High-temperature stability of epitaxial, non-isostructural Mo/NbN superlattices
- Advanced Coating Technology Group and Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois, and Physics Department, Linkoeping University, (Sweden)
- Advanced Coating Technology Group and Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois (United States)
- Physics Department, Linkoeping University, (Sweden)
- Los Alamos National Laboratory, Los Alamos, New Mexico (United States)
The effect of 1000 degree sign C vacuum annealing on the structure and hardness of epitaxial Mo/NbN superlattice thin films was studied. The intensity of superlattice satellite peaks, measured by x-ray diffraction, decreased during annealing while new peaks corresponding to a MoNbN ternary phase appeared. The results are consistent with the Mo-Nb-N phase diagram, which shows no mutual solubility between Mo, NbN, and MoNbN. Even after 3-h anneals and a loss of most of the superlattice peak intensity, the room-temperature hardness was the same as for as-deposited superlattices. The retained hardness suggests that a residual nanocomposite structure is retained even after the formation of the ternary structure. (c) 2000 Materials Research Society.
- OSTI ID:
- 20216020
- Journal Information:
- Journal of Materials Research, Vol. 15, Issue 2; Other Information: PBD: Feb 2000; ISSN 0884-2914
- Country of Publication:
- United States
- Language:
- English
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