Inductively coupled plasma assisted deposition and mechanical properties of metal-free and Ti-containing hydrocarbon coatings
- Mechanical Engineering Department, Louisiana State University, Baton Rouge, Louisiana 70808 (United States)
- Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 (United States)
Metal-free amorphous hydrocarbon (a-C:H) and Ti-containing hydrocarbon (Ti-C:H) coatings have been synthesized in a hybrid chemical vapor deposition (CVD)/physical vapor deposition (PVD) system which combines inductively coupled plasma (ICP) and sputter deposition. a-C:H coatings have been fabricated by ICP assisted CVD in inert/hydrocarbon gas mixtures while Ti-C:H coatings have been fabricated by ICP assisted magnetron sputtering of Ti in inert/hydrocarbon gas mixtures. We present results of structural characterization and mechanical property measurements on these a-C:H and Ti-C:H coatings. In particular, the influence of hydrogen on the coating mechanical properties is probed experimentally. We show that hydrogen significantly influences the mechanical properties of a-C:H and Ti-C:H coatings and needs to be considered for a full understanding of the mechanical properties of Ti-C:H coatings. Our results demonstrate that combining ICP with sputter deposition makes a versatile CVD/PVD tool capable of depositing metal-free and metal-containing hydrocarbon coatings with widely varying microstructures and mechanical properties. (c) 2000 American Institute of Physics.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL
- OSTI ID:
- 20215595
- Journal Information:
- Journal of Applied Physics, Vol. 87, Issue 6; Other Information: PBD: 15 Mar 2000; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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