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Title: In situ mass spectrometric study of pyrite (FeS{sub 2}) thin film deposition with metallorganic chemical vapor deposition

Abstract

Pyrite, FeS{sub 2}, thin films have been prepared by metallorganic chemical vapor deposition using tert-butyl disulfide (TBDS) and iron(III) acetylacetonate [Fe(acac){sub 3}] as the precursors and H{sub 2} as co-reactant. The reaction mechanism is studied with in situ mass spectrometry. The thermal decomposition of TBDS and Fe(acac){sub 3} has been investigated, as well as the synthesis of FeS{sub 2}. A complicated gas-phase reaction chain occurs in the deposition reaction. In the first 1--2 cm of the deposition zone, thick rough films are formed, but further downstream in the reactor a smooth FeS{sub 2} film is deposited. This remarkable change in morphology is accounted for in the proposed reaction mechanism.

Authors:
; ; ;
Publication Date:
Research Org.:
Delft Univ. of Technology (NL)
OSTI Identifier:
20080580
Resource Type:
Journal Article
Journal Name:
Journal of the Electrochemical Society
Additional Journal Information:
Journal Volume: 147; Journal Issue: 5; Other Information: PBD: May 2000; Journal ID: ISSN 0013-4651
Country of Publication:
United States
Language:
English
Subject:
14 SOLAR ENERGY; 36 MATERIALS SCIENCE; PYRITE; CHEMICAL VAPOR DEPOSITION; CHEMICAL REACTION KINETICS; VAPOR DEPOSITED COATINGS; MORPHOLOGY; SOLAR ABSORBERS; SOLAR CELLS

Citation Formats

Reijnen, L., Meester, B., Goossens, A., and Schoonman, J. In situ mass spectrometric study of pyrite (FeS{sub 2}) thin film deposition with metallorganic chemical vapor deposition. United States: N. p., 2000. Web. doi:10.1149/1.1393437.
Reijnen, L., Meester, B., Goossens, A., & Schoonman, J. In situ mass spectrometric study of pyrite (FeS{sub 2}) thin film deposition with metallorganic chemical vapor deposition. United States. doi:10.1149/1.1393437.
Reijnen, L., Meester, B., Goossens, A., and Schoonman, J. Mon . "In situ mass spectrometric study of pyrite (FeS{sub 2}) thin film deposition with metallorganic chemical vapor deposition". United States. doi:10.1149/1.1393437.
@article{osti_20080580,
title = {In situ mass spectrometric study of pyrite (FeS{sub 2}) thin film deposition with metallorganic chemical vapor deposition},
author = {Reijnen, L. and Meester, B. and Goossens, A. and Schoonman, J.},
abstractNote = {Pyrite, FeS{sub 2}, thin films have been prepared by metallorganic chemical vapor deposition using tert-butyl disulfide (TBDS) and iron(III) acetylacetonate [Fe(acac){sub 3}] as the precursors and H{sub 2} as co-reactant. The reaction mechanism is studied with in situ mass spectrometry. The thermal decomposition of TBDS and Fe(acac){sub 3} has been investigated, as well as the synthesis of FeS{sub 2}. A complicated gas-phase reaction chain occurs in the deposition reaction. In the first 1--2 cm of the deposition zone, thick rough films are formed, but further downstream in the reactor a smooth FeS{sub 2} film is deposited. This remarkable change in morphology is accounted for in the proposed reaction mechanism.},
doi = {10.1149/1.1393437},
journal = {Journal of the Electrochemical Society},
issn = {0013-4651},
number = 5,
volume = 147,
place = {United States},
year = {2000},
month = {5}
}