In situ mass spectrometric study of pyrite (FeS{sub 2}) thin film deposition with metallorganic chemical vapor deposition
Pyrite, FeS{sub 2}, thin films have been prepared by metallorganic chemical vapor deposition using tert-butyl disulfide (TBDS) and iron(III) acetylacetonate [Fe(acac){sub 3}] as the precursors and H{sub 2} as co-reactant. The reaction mechanism is studied with in situ mass spectrometry. The thermal decomposition of TBDS and Fe(acac){sub 3} has been investigated, as well as the synthesis of FeS{sub 2}. A complicated gas-phase reaction chain occurs in the deposition reaction. In the first 1--2 cm of the deposition zone, thick rough films are formed, but further downstream in the reactor a smooth FeS{sub 2} film is deposited. This remarkable change in morphology is accounted for in the proposed reaction mechanism.
- Research Organization:
- Delft Univ. of Technology (NL)
- OSTI ID:
- 20080580
- Journal Information:
- Journal of the Electrochemical Society, Vol. 147, Issue 5; Other Information: PBD: May 2000; ISSN 0013-4651
- Country of Publication:
- United States
- Language:
- English
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