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Title: Characterization of photoluminescent (Y{sub 1{minus}x}Eu{sub x}){sub 2}O{sub 3} thin films prepared by metallorganic chemical vapor deposition

Abstract

The purpose of this study was to identify and correlate the microstructural and luminescence properties of europium-doped Y{sub 2}O{sub 3} (Y{sub 1{minus}x}Eu{sub x}){sub 2}O{sub 3} thin films deposited by metallorganic chemical vapor deposition (MOCVD), as a function of deposition time and temperature. The influence of deposition parameters on the crystallite size and microstructural morphology were examined, as well as the influence of these parameters on the photoluminescence emission spectra. (Y{sub 1{minus}x}Eu{sub x}){sub 2}O{sub 3} thin films were deposited onto (111) silicon and (001) sapphire substrates by MOCVD. The films were grown by reacting yttrium and europium tris(2,2,6,6-tetramethyl-3,5-heptanedionate) precursors with an oxygen atmosphere at low pressures (5 torr (1.7 x 10{sup 3} Pa)) and low substrate temperatures (500--700 C). The films deposited at 500 C were smooth and composed of nanocrystalline regions of cubic Y{sub 2}O{sub 3}, grown in a textured [100] or [110] orientation to the substrate surface. Films deposited at 600 C developed, with increasing deposition time, from a flat, nanocrystalline morphology into a platelike growth morphology with [111] orientation. Monoclinic (Y{sub 1{minus}x}Eu{sub x}){sub 2}O{sub 3} was observed in the photoluminescence emission spectra for all deposition temperatures. The increase in photoluminescence emission intensity with increasing post-deposition annealing temperature wasmore » attributed to the surface/grain boundary area-reduction effect.« less

Authors:
; ; ; ; ; ;
Publication Date:
Research Org.:
Univ. of California at San Diego, La Jolla, CA (US)
OSTI Identifier:
20075977
Resource Type:
Journal Article
Journal Name:
Journal of the American Ceramic Society
Additional Journal Information:
Journal Volume: 83; Journal Issue: 5; Other Information: PBD: May 2000; Journal ID: ISSN 0002-7820
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; MICROSTRUCTURE; LUMINESCENCE; YTTRIUM OXIDES; EUROPIUM OXIDES; THIN FILMS; CHEMICAL VAPOR DEPOSITION; ORGANOMETALLIC COMPOUNDS; TEMPERATURE DEPENDENCE

Citation Formats

McKittrick, J., Bacalski, C.F., Hirata, G.A., Hubbard, K.M., Pattillo, S.G., Salazar, K.V., and Trkula, M. Characterization of photoluminescent (Y{sub 1{minus}x}Eu{sub x}){sub 2}O{sub 3} thin films prepared by metallorganic chemical vapor deposition. United States: N. p., 2000. Web.
McKittrick, J., Bacalski, C.F., Hirata, G.A., Hubbard, K.M., Pattillo, S.G., Salazar, K.V., & Trkula, M. Characterization of photoluminescent (Y{sub 1{minus}x}Eu{sub x}){sub 2}O{sub 3} thin films prepared by metallorganic chemical vapor deposition. United States.
McKittrick, J., Bacalski, C.F., Hirata, G.A., Hubbard, K.M., Pattillo, S.G., Salazar, K.V., and Trkula, M. Mon . "Characterization of photoluminescent (Y{sub 1{minus}x}Eu{sub x}){sub 2}O{sub 3} thin films prepared by metallorganic chemical vapor deposition". United States.
@article{osti_20075977,
title = {Characterization of photoluminescent (Y{sub 1{minus}x}Eu{sub x}){sub 2}O{sub 3} thin films prepared by metallorganic chemical vapor deposition},
author = {McKittrick, J. and Bacalski, C.F. and Hirata, G.A. and Hubbard, K.M. and Pattillo, S.G. and Salazar, K.V. and Trkula, M.},
abstractNote = {The purpose of this study was to identify and correlate the microstructural and luminescence properties of europium-doped Y{sub 2}O{sub 3} (Y{sub 1{minus}x}Eu{sub x}){sub 2}O{sub 3} thin films deposited by metallorganic chemical vapor deposition (MOCVD), as a function of deposition time and temperature. The influence of deposition parameters on the crystallite size and microstructural morphology were examined, as well as the influence of these parameters on the photoluminescence emission spectra. (Y{sub 1{minus}x}Eu{sub x}){sub 2}O{sub 3} thin films were deposited onto (111) silicon and (001) sapphire substrates by MOCVD. The films were grown by reacting yttrium and europium tris(2,2,6,6-tetramethyl-3,5-heptanedionate) precursors with an oxygen atmosphere at low pressures (5 torr (1.7 x 10{sup 3} Pa)) and low substrate temperatures (500--700 C). The films deposited at 500 C were smooth and composed of nanocrystalline regions of cubic Y{sub 2}O{sub 3}, grown in a textured [100] or [110] orientation to the substrate surface. Films deposited at 600 C developed, with increasing deposition time, from a flat, nanocrystalline morphology into a platelike growth morphology with [111] orientation. Monoclinic (Y{sub 1{minus}x}Eu{sub x}){sub 2}O{sub 3} was observed in the photoluminescence emission spectra for all deposition temperatures. The increase in photoluminescence emission intensity with increasing post-deposition annealing temperature was attributed to the surface/grain boundary area-reduction effect.},
doi = {},
journal = {Journal of the American Ceramic Society},
issn = {0002-7820},
number = 5,
volume = 83,
place = {United States},
year = {2000},
month = {5}
}