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Title: Thermophoretic vacuum wand

Abstract

A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.

Authors:
;
Publication Date:
Sponsoring Org.:
US Department of Energy
OSTI Identifier:
20075859
Alternate Identifier(s):
OSTI ID: 20075859
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 6 Jun 2000
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; MATERIALS HANDLING EQUIPMENT; CLEAN ROOMS; REMOTE HANDLING; DESIGN; VACUUM SYSTEMS; HEATERS; PARTICULATES; THERMOPHORESIS

Citation Formats

Klebanoff, L.E., and Rader, D.J. Thermophoretic vacuum wand. United States: N. p., 2000. Web.
Klebanoff, L.E., & Rader, D.J. Thermophoretic vacuum wand. United States.
Klebanoff, L.E., and Rader, D.J. Tue . "Thermophoretic vacuum wand". United States.
@article{osti_20075859,
title = {Thermophoretic vacuum wand},
author = {Klebanoff, L.E. and Rader, D.J.},
abstractNote = {A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {6}
}