Chemical vapor deposition of fluorine-doped zinc oxide
Patent
·
OSTI ID:20075841
Films of fluorine-doped zinc oxide are deposited from vaporized precursor compounds comprising a chelate of a dialkylzinc, such as an amine chelate, an oxygen source, and a fluorine source. The coatings are highly electrically conductive, transparent to visible light, reflective to infrared radiation, absorbing to ultraviolet light, and free of carbon impurity.
- Sponsoring Organization:
- USDOE
- OSTI ID:
- 20075841
- Resource Relation:
- Other Information: PBD: 6 Jun 2000
- Country of Publication:
- United States
- Language:
- English
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