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Title: Micro benchtop optics by bulk silicon micromachining

Abstract

Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems.

Authors:
; ; ;
Publication Date:
Sponsoring Org.:
US Department of Energy
OSTI Identifier:
20075840
Alternate Identifier(s):
OSTI ID: 20075840
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 6 Jun 2000
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; MINIATURIZATION; MICROELECTRONIC CIRCUITS; OPTICAL SYSTEMS; MACHINING; SILICON; ETCHING; MEASURING INSTRUMENTS; LASERS; BEAM SPLITTING; OPTICAL FIBERS

Citation Formats

Lee, A.P., Pocha, M.D., McConaghy, C.F., and Deri, R.J. Micro benchtop optics by bulk silicon micromachining. United States: N. p., 2000. Web.
Lee, A.P., Pocha, M.D., McConaghy, C.F., & Deri, R.J. Micro benchtop optics by bulk silicon micromachining. United States.
Lee, A.P., Pocha, M.D., McConaghy, C.F., and Deri, R.J. Tue . "Micro benchtop optics by bulk silicon micromachining". United States.
@article{osti_20075840,
title = {Micro benchtop optics by bulk silicon micromachining},
author = {Lee, A.P. and Pocha, M.D. and McConaghy, C.F. and Deri, R.J.},
abstractNote = {Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {6}
}