Apparatus and method for the determination of grain size in thin films

Patent · Tue Mar 14 00:00:00 EST 2000

OSTI ID:20015706

Maris, H J

A method is disclosed for the determination of grain size in a thin film sample comprising the steps of measuring first and second changes in the optical response of the thin film, comparing the first and second changes to find the attenuation of a propagating disturbance in the film and associating the attenuation of the disturbance to the grain size of the film. The second change in optical response is time delayed from the first change in optical response.

• Sponsoring Organization: USDOE
• DOE Contract Number: FG02-86ER45267
• OSTI ID: 20015706
• Resource Relation: Other Information: PBD: 14 Mar 2000
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
MATERIALS
THIN FILMS
GRAIN SIZE
MEASURING METHODS
OPTICAL PROPERTIES
TIME DELAY
COMPARATIVE EVALUATIONS