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Title: Uncooled thin film pyroelectric IR detector with aerogel thermal isolation

Abstract

A monolithic infrared detector structure which allows integration of pyroelectric thin films atop low thermal conductivity aerogel thin films is disclosed. The structure comprises, from bottom to top, a substrate, an aerogel insulating layer, a lower electrode, a pyroelectric layer, and an upper electrode layer capped by a blacking layer. The aerogel can offer thermal conductivity less than that of air, while providing a much stronger monolithic alternative to cantilevered or suspended air-gap structures for pyroelectric thin film pixel arrays. PbZr{sub 0.4}Ti{sub 0.6}O{sub 3} thin films deposited on these structures displayed viable pyroelectric properties, while processed at 550 C.

Authors:
; ; ; ; ; ;
Publication Date:
Sponsoring Org.:
US Department of Energy
OSTI Identifier:
20013815
Alternate Identifier(s):
OSTI ID: 20013815
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 7 Sep 1999
Country of Publication:
United States
Language:
English
Subject:
44 INSTRUMENTATION; INFRARED RADIATION; THERMAL INSULATION; PYROELECTRIC DETECTORS; DESIGN; FOAMS; THERMAL CONDUCTIVITY; PZT

Citation Formats

Ruffner, J.A., Bullington, J.A., Clem, P.G., Warren, W.L., Brinker, C.J., Tuttle, B.A., and Schwartz, R.W. Uncooled thin film pyroelectric IR detector with aerogel thermal isolation. United States: N. p., 1999. Web.
Ruffner, J.A., Bullington, J.A., Clem, P.G., Warren, W.L., Brinker, C.J., Tuttle, B.A., & Schwartz, R.W. Uncooled thin film pyroelectric IR detector with aerogel thermal isolation. United States.
Ruffner, J.A., Bullington, J.A., Clem, P.G., Warren, W.L., Brinker, C.J., Tuttle, B.A., and Schwartz, R.W. Tue . "Uncooled thin film pyroelectric IR detector with aerogel thermal isolation". United States.
@article{osti_20013815,
title = {Uncooled thin film pyroelectric IR detector with aerogel thermal isolation},
author = {Ruffner, J.A. and Bullington, J.A. and Clem, P.G. and Warren, W.L. and Brinker, C.J. and Tuttle, B.A. and Schwartz, R.W.},
abstractNote = {A monolithic infrared detector structure which allows integration of pyroelectric thin films atop low thermal conductivity aerogel thin films is disclosed. The structure comprises, from bottom to top, a substrate, an aerogel insulating layer, a lower electrode, a pyroelectric layer, and an upper electrode layer capped by a blacking layer. The aerogel can offer thermal conductivity less than that of air, while providing a much stronger monolithic alternative to cantilevered or suspended air-gap structures for pyroelectric thin film pixel arrays. PbZr{sub 0.4}Ti{sub 0.6}O{sub 3} thin films deposited on these structures displayed viable pyroelectric properties, while processed at 550 C.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {9}
}