Multiple Stable Oscillators Referenced to the Same Multimode AlN/Si MEMS Resonator with Mode-Dependent Phase Noise and Frequency Stability

Mandal, Soumyajit; Kaisar, Tahmid; Yousuf,; Lee, Jaesung; Qamar, Afzaal; Rais-Zadeh, Mina; Feng, Philip X.

doi:10.1109/iedm45625.2022.10019478

Multiple Stable Oscillators Referenced to the Same Multimode AlN/Si MEMS Resonator with Mode-Dependent Phase Noise and Frequency Stability

Conference · 03 December 2022

DOI:https://doi.org/10.1109/iedm45625.2022.10019478· OSTI ID:1988601

Mandal, Soumyajit; Kaisar, Tahmid; Yousuf,; Lee, Jaesung; Qamar, Afzaal; Rais-Zadeh, Mina; Feng, Philip X.

Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

DOE Contract Number:: SC0012704

OSTI ID:: 1988601

Report Number(s):: BNL-224540-2023-COPA

Resource Relation:: Conference: 2022 IEEE International Electron Devices Meeting (IEDM), San Francisco, CA, USA, 12/3/2022 - 12/7/2022

Country of Publication:: United States

Language:: English

References (7)

Frequency fluctuations in silicon nanoresonators Sansa, Marc; Sage, Eric; Bullard, Elizabeth C. Nature Nanotechnology, Vol. 11, Issue 6 https://doi.org/10.1038/nnano.2016.19	journal	February 2016
A self-sustaining ultrahigh-frequency nanoelectromechanical oscillator Feng, X. L.; White, C. J.; Hajimiri, A. Nature Nanotechnology, Vol. 3, Issue 6 https://doi.org/10.1038/nnano.2008.125	journal	May 2008
A Temperature-Compensated Single-Crystal Silicon-on-Insulator (SOI) MEMS Oscillator with a CMOS Amplifier Chip Islam, Mohammad; Wei, Ran; Lee, Jaesung Micromachines, Vol. 9, Issue 11 https://doi.org/10.3390/mi9110559	journal	October 2018
High-speed multiple-mode mass-sensing resolves dynamic nanoscale mass distributions Olcum, Selim; Cermak, Nathan; Wasserman, Steven C. Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms8070	journal	May 2015
Inertial imaging with nanomechanical systems Hanay, M. Selim; Kelber, Scott I.; O'Connell, Cathal D. Nature Nanotechnology, Vol. 10, Issue 4 https://doi.org/10.1038/nnano.2015.32	journal	March 2015
Study of Energy Loss Mechanisms in AlN-Based Piezoelectric Length Extensional-Mode Resonators Qamar, Afzaal; Sherrit, Stewart; Zheng, Xu-Qian Journal of Microelectromechanical Systems, Vol. 28, Issue 4 https://doi.org/10.1109/JMEMS.2019.2913875	journal	August 2019
Series-resonant VHF micromechanical resonator reference oscillators No authors listed IEEE Journal of Solid-State Circuits, Vol. 39, Issue 12 https://doi.org/10.1109/JSSC.2004.837086	journal	December 2004

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