Discrete, Shallow Doping of Semiconductors via Cylinder-Forming Block Copolymer Self-Assembly

Zhang, Yuanyi; Danielsen, Scott P.  O.; Popere, Bhooshan C.; Heitsch, Andrew T.; Li, Mingqi; Trefonas, Peter; Segalman, Rachel A.; Katsumata, Reika

doi:10.1002/mame.202200155

Discrete, Shallow Doping of Semiconductors via Cylinder-Forming Block Copolymer Self-Assembly

Journal Article · 01 May 2022 · Macromolecular Materials and Engineering

DOI:https://doi.org/10.1002/mame.202200155· OSTI ID:1981421

^[1]; ^[1]; Popere, Bhooshan C. ^[1]; Heitsch, Andrew T. ^[2]; Li, Mingqi ^[3]; Trefonas, Peter ^[3]; ^[4]; ^[5]

Department of Chemical Engineering University of California Santa Barbara CA 93106 USA
The Dow Chemical Company Lake Jackson TX 77566 USA
DuPont Electronics &, Industrial Marlborough MA 01752 USA
Department of Chemical Engineering University of California Santa Barbara CA 93106 USA; Materials Department and Material Research Laboratory University of California Santa Barbara CA 93106 USA
Polymer Science and Engineering Department University of Massachusetts Amherst Amherst MA 01003 USA

Not provided.

Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States). Advanced Light Source (ALS)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC02-05CH11231

OSTI ID:: 1981421

Journal Information:: Macromolecular Materials and Engineering, Vol. 307, Issue 9; ISSN 1438-7492

Publisher:: Wiley

Country of Publication:: United States

Language:: English

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