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A review of molecular-beam epitaxy of wide bandgap complex oxide semiconductors

Journal Article · · Journal of Materials Research

Not provided.

Research Organization:
Univ. of Minnesota, Minneapolis, MN (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
DOE Contract Number:
SC0016371
OSTI ID:
1981012
Journal Information:
Journal of Materials Research, Vol. 36, Issue 23; ISSN 0884-2914
Publisher:
Springer Nature
Country of Publication:
United States
Language:
English

References (192)

Wide Bandgap Oxide Semiconductors: from Materials Physics to Optoelectronic Devices journal April 2021
Band offsets of wide-band-gap oxides and implications for future electronic devices journal January 2000
Wide-bandgap semiconductor materials: For their full bloom journal February 2015
Thousandfold Change in Resistivity in Magnetoresistive La-Ca-Mn-O Films journal April 1994
Possible highT c superconductivity in the Ba?La?Cu?O system journal June 1986
Structure of BaBiO3−δ at high temperature journal December 1990
Ferroelectromagnets journal July 1982
A ferroelectric-like structural transition in a metal journal September 2013
Towards precise defect control in layered oxide structures by using oxide molecular beam epitaxy journal January 2014
Perspective: Oxide molecular-beam epitaxy rocks! journal June 2015
Frontiers in the Growth of Complex Oxide Thin Films: Past, Present, and Future of Hybrid MBE journal December 2017
Wide Bandgap Perovskite Oxides with High Room‐Temperature Electron Mobility journal June 2019
New approaches for achieving more perfect transition metal oxide thin films journal April 2020
Epitaxial Oxides on Semiconductors: From Fundamentals to New Devices journal July 2019
Band alignment at epitaxial BaSnO3/SrTiO3(001) and BaSnO3/LaAlO3(001) heterojunctions journal April 2016
Electron Mobility in Semiconducting Strontium Titanate journal March 1967
Superconductivity in Semiconducting SrTi O 3 journal April 1964
A high-mobility electron gas at the LaAlO3/SrTiO3 heterointerface journal January 2004
Persistent Photoconductivity in Strontium Titanate journal October 2013
High Mobility in a Stable Transparent Perovskite Oxide journal May 2012
High carrier mobility in transparent Ba 1−x La x SnO 3 crystals with a wide band gap journal April 2012
Probing the Electronic Structures of Ternary Perovskite and Pyrochlore Oxides Containing Sn 4+ or Sb 5+ journal March 2004
Electronic band structure and optical phonons of BaSnO 3 and Ba 0.97 La 0.03 SnO 3 single crystals: Theory and experiment journal August 2012
Conduction band edge effective mass of La-doped BaSnO 3 journal June 2016
Review Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017 journal September 2017
The Bakerian Lecture: Experimental Relations of Gold (and Other Metals) to Light journal January 1857
Crystal chemistry and magnetic properties of layered metal oxides possessing the K2NiF4 or related structures journal July 1984
Preparation of Y‐Ba‐Cu oxide superconductor thin films using pulsed laser evaporation from high Tc bulk material journal August 1987
Superconductivity at 93 K in a new mixed-phase Y-Ba-Cu-O compound system at ambient pressure journal March 1987
Interaction of Ga and As 2 Molecular Beams with GaAs Surfaces journal July 1968
Molecular beam epitaxy journal January 1975
MBE deserves a place in the history books journal May 2007
Growth of high-quality SrTiO3 films using a hybrid molecular beam epitaxy approach
  • Jalan, Bharat; Engel-Herbert, Roman; Wright, Nicholas J.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 27, Issue 3 https://doi.org/10.1116/1.3106610
journal May 2009
Novel synthesis approach for “stubborn” metals and metal oxides journal August 2021
Electron mobilities in modulation‐doped semiconductor heterojunction superlattices journal October 1978
Nobel Lecture: The fractional quantum Hall effect journal July 1999
Molecular beam epitaxy of II‐VI compounds journal June 1975
Reactive molecular beam epitaxy of aluminium nitride journal July 1979
Fabrication and characterization of heterostructures with subnanometer thickness journal October 1984
Growth of thin-film lithium niobate by molecular beam epitaxy journal January 1985
Structural and superconducting properties of orientation-orderedY1Ba2Cu3O7−xfilms prepared by molecular-beam epitaxy journal September 1987
Growth of highTcsuperconducting thin films using molecular beam epitaxy techniques journal October 1987
I n s i t u formation of superconducting YBa 2 Cu 3 O 7 x thin films using pure ozone vapor oxidation journal November 1988
Molecular beam epitaxial growth of layered Bi-Sr-Ca-Cu-O compounds journal May 1990
Growth of ZnO Thin Film by Laser MBE: Lasing of Exciton at Room Temperature journal August 1997
MBE growth and properties of ZnO on sapphire and SiC substrates journal May 1996
MgZnO/ZnO heterostructures with electron mobility exceeding 1 × 106 cm2/Vs journal May 2016
Self-limiting process for the bismuth content in molecular beam epitaxial growth of Bi2Sr2CuOy thin films journal December 1997
Adsorption-controlled growth of PbTiO3 by reactive molecular beam epitaxy journal July 1998
Adsorption-controlled growth of Bi4Ti3O12 by reactive MBE journal June 1998
Quintuple-layer epitaxy of thin films of topological insulator Bi2Se3 journal August 2009
Spin-transfer torque generated by a topological insulator journal July 2014
Atomically engineered ferroic layers yield a room-temperature magnetoelectric multiferroic journal September 2016
Adsorption-controlled growth of La-doped BaSnO 3 by molecular-beam epitaxy journal November 2017
Wide bandgap BaSnO3 films with room temperature conductivity exceeding 104 S cm−1 journal May 2017
Defects in complex oxide thin films for electronics and energy applications: challenges and opportunities journal January 2020
Ion beam induced crystalline texturing during thin film deposition journal February 2015
Defects and transport in complex oxide thin films journal May 2008
Epitaxial growth of the first five members of the Srn+1TinO3n+1 Ruddlesden–Popper homologous series journal May 2001
Epitaxial growth and magnetic properties of the first five members of the layered Srn+1RunO3n+1 oxide series journal January 2007
Exploiting dimensionality and defect mitigation to create tunable microwave dielectrics journal October 2013
Creating Ruddlesden-Popper phases by hybrid molecular beam epitaxy journal July 2016
Improved control of atomic layering in perovskite-related homologous series journal February 2021
Effect of reduced dimensionality on the optical band gap of SrTiO 3 journal March 2013
Atomically precise interfaces from non-stoichiometric deposition journal August 2014
Direct production of crystalline superconducting thin films of YBa2Cu3O7 by high-pressure oxygen sputtering journal May 1988
Fabrication of superconducting Nd2−xCexCuO4±δ films by automated dc sputtering technique journal December 2013
Strain and electric field control of magnetism in La(1--x)SrxMnO3 thin films on ferroelectric BaTiO3 substrates journal May 2020
Improved PbZr0.52Ti0.48O3 film quality on SrRuO3/SrTiO3 substrates journal April 2005
Nano-laminate vs. direct deposition of high permittivity gadolinium scandate on silicon by high pressure sputtering journal October 2015
Polarization and lattice strains in epitaxial BaTiO3 films grown by high-pressure sputtering journal June 2007
Defects, stoichiometry, and electronic transport in SrTiO3-δ epilayers: A high pressure oxygen sputter deposition study journal August 2016
Structure and transport in high pressure oxygen sputter-deposited BaSnO 3−δ journal June 2015
Structure-property relationships and mobility optimization in sputtered La-doped BaSnO3 films: Toward 100cm2V−1s−1 mobility journal April 2021
One-step epitaxy of high-mobility La-doped BaSnO3 films by high-pressure magnetron sputtering journal June 2021
Mapping the surface phase diagram of GaAs(001) using droplet epitaxy journal December 2019
Epitaxial growth and properties of thin film oxides journal August 2000
Probing surfaces and interfaces in complex oxide films via in situ X-ray photoelectron spectroscopy journal January 2021
Direct Observation and Control of Surface Termination in Perovskite Oxide Heterostructures journal May 2021
In Situ Monitoring of Composition and Sensitivity to Growth Parameters of Pulsed Laser Deposition journal February 2021
Portable ultrahigh-vacuum sample storage system for polarization-dependent total-reflection fluorescence x-ray absorption fine structure spectroscopy
  • Watanabe, Yoshihide; Nishimura, Yusaku F.; Suzuki, Ryo
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 34, Issue 2 https://doi.org/10.1116/1.4936344
journal March 2016
Accurate measurement of atomic beam flux by pseudo‐double‐beam atomic absorption spectroscopy for growth of thin‐film oxide superconductors journal February 1992
Rate controlling and composition analysis of alloy deposition processes by electron impact emission spectroscopy (EIES) journal January 1977
Growth of Ba1−xKxBiO3 thin films by molecular beam epitaxy journal October 2004
An electron impact emission spectroscopy flux sensor for monitoring deposition rate at high background gas pressure with improved accuracy journal July 2008
RHEED Intensity Oscillations for the Stoichiometric Growth of SrTiO3 Thin Films by Reactive Molecular Beam Epitaxy journal January 2000
Oxide nano-engineering using MBE journal December 2001
Improved flux control from the Sentinel III electron impact emission spectroscopy system
  • Kubiak, R. A.; Newstead, S. M.; Powell, A. R.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 9, Issue 4 https://doi.org/10.1116/1.577294
journal July 1991
Epitaxial lead titanate grown by MBE journal April 1997
Molecular beam epitaxy of SrTiO3 with a growth window journal July 2009
Cheap and stable titanium source for use in oxide molecular beam epitaxy systems journal July 1996
Sr flux stability against oxidation in oxide-molecular-beam-epitaxy environment: Flux, geometry, and pressure dependence
  • Kim, Y. S.; Bansal, Namrata; Chaparro, Carlos
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 28, Issue 2 https://doi.org/10.1116/1.3298880
journal March 2010
La-doped SrTiO 3 films with large cryogenic thermoelectric power factors journal May 2013
Dramatic mobility enhancements in doped SrTiO3 thin films by defect management journal July 2010
Single-crystalline BaTiO 3 films grown by gas-source molecular beam epitaxy journal November 2014
Growth window and effect of substrate symmetry in hybrid molecular beam epitaxy of a Mott insulating rare earth titanate
  • Moetakef, Pouya; Zhang, Jack Y.; Raghavan, Santosh
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 31, Issue 4 https://doi.org/10.1116/1.4804180
journal July 2013
Probing the Metal-Insulator Transition in BaTiO 3 by Electrostatic Doping journal July 2016
Highly Conductive SrVO 3 as a Bottom Electrode for Functional Perovskite Oxides journal May 2013
Hybrid molecular beam epitaxy for the growth of stoichiometric BaSnO 3
  • Prakash, Abhinav; Dewey, John; Yun, Hwanhui
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 6 https://doi.org/10.1116/1.4933401
journal November 2015
Defect-driven localization crossovers in MBE-grown La-doped SrSn O 3 films journal November 2017
Adsorption-controlled growth and the influence of stoichiometry on electronic transport in hybrid molecular beam epitaxy-grown BaSnO 3 films journal January 2017
In situ thermal preparation of oxide surfaces journal July 2020
Atomic-scale imaging of nanoengineered oxygen vacancy profiles in SrTiO3 journal August 2004
Oxygen concentration and its effect on the leakage current in BiFeO3 thin films journal January 2010
High-mobility BaSnO 3 grown by oxide molecular beam epitaxy journal January 2016
Mobility-electron density relation probed via controlled oxygen vacancy doping in epitaxial BaSnO 3 journal May 2017
Molecular beam epitaxy of layered Dy‐Ba‐Cu‐O compounds journal October 1988
Characterization of a radio frequency plasma source for molecular beam epitaxial growth of high‐ T c superconductor films
  • Locquet, Jean‐Pierre; Mächler, Erich
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 10, Issue 5 https://doi.org/10.1116/1.577871
journal September 1992
Heteroepitaxial growth of α-Fe2O3, γ-Fe2O3 and Fe3O4 thin films by oxygen-plasma-assisted molecular beam epitaxy journal April 1997
Growth and structural characterization of Fe 3 O 4 and NiO thin films and superlattices grown by oxygen-plasma-assisted molecular-beam epitaxy journal January 1992
Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N2: Neutral kinetic energies and source gas cracking journal February 1998
Growth of ZnO by Molecular Beam Epitaxy Using NO2 as Oxygen Source
  • Keiichiro Sakurai, Keiichiro Sakurai; Daiji Iwata, Daiji Iwata; Shizuo Fujita, Shizuo Fujita
  • Japanese Journal of Applied Physics, Vol. 38, Issue 4S https://doi.org/10.1143/JJAP.38.2606
journal April 1999
Molecular beam epitaxy of high-quality ZnO using hydrogen peroxide as an oxidant journal September 2004
Structure and optical band gaps of (Ba,Sr)SnO3 films grown by molecular beam epitaxy
  • Schumann, Timo; Raghavan, Santosh; Ahadi, Kaveh
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 34, Issue 5 https://doi.org/10.1116/1.4959004
journal July 2016
Growth of SrTiO 3 on Si(001) by hybrid molecular beam epitaxy : Growth of SrTiO journal September 2014
Dopant solubility and charge compensation in La-doped SrSnO 3 films journal October 2019
Strain Relaxation via Phase Transformation in High-Mobility SrSnO3 Films journal March 2021
Engineering SrSnO 3 Phases and Electron Mobility at Room Temperature Using Epitaxial Strain journal November 2018
Effects of oxygen on the sublimation of alkaline earths from effusion cells journal March 1994
Simple self-gettering differential-pump for minimizing source oxidation in oxide-MBE environment
  • Kim, Yong-Seung; Bansal, Namrata; Oh, Seongshik
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 29, Issue 4 https://doi.org/10.1116/1.3591384
journal July 2011
Crucible aperture: An effective way to reduce source oxidation in oxide molecular beam epitaxy process
  • Kim, Yong-Seung; Bansal, Namrata; Oh, Seongshik
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 28, Issue 4 https://doi.org/10.1116/1.3449051
journal July 2010
Film deposition by thermal laser evaporation journal August 2019
Making BaZrS 3 Chalcogenide Perovskite Thin Films by Molecular Beam Epitaxy journal August 2021
Growth of metallic delafossite PdCo O 2 by molecular beam epitaxy journal September 2019
Interplay of Spin-Orbit Interactions, Dimensionality, and Octahedral Rotations in Semimetallic SrIrO 3 journal January 2015
Synthesis science of SrRuO 3 and CaRuO 3 epitaxial films with high residual resistivity ratios journal April 2018
Superconductivity in Uniquely Strained RuO 2 Films journal September 2020
Strain-stabilized superconductivity journal January 2021
Silicon MBE apparatus for uniform high‐rate deposition on standard format wafers journal February 1982
Ultra-high throughput of GaAs and (AlGa)As layers grown by MBE with a specially designed MBE system journal February 1989
High speed growth of device quality GaN and InGaN by RF-MBE journal May 1999
Adsorption-controlled growth of Ga2O3 by suboxide molecular-beam epitaxy journal March 2021
Scaling growth rates for perovskite oxide virtual substrates on silicon journal June 2019
High-temperature-grown buffer layer boosts electron mobility in epitaxial La-doped BaSnO 3 /SrZrO 3 heterostructures journal April 2019
High mobility BaSnO 3 films and field effect transistors on non-perovskite MgO substrate journal December 2016
Improvement of electron mobility in La:BaSnO 3 thin films by insertion of an atomically flat insulating (Sr,Ba)SnO 3 buffer layer journal June 2016
Physical properties of transparent perovskite oxides (Ba,La)SnO 3 with high electrical mobility at room temperature journal October 2012
Electrical transport, magnetic, and thermodynamic properties of La-, Pr-, and Nd-doped BaSn O 3 − δ single crystals journal August 2018
Cation-size control of structural phase transitions in tin perovskites journal November 2003
Large-lattice-parameter perovskite single-crystal substrates journal January 2017
Single crystal growth and characterization of Ba2ScNbO6 – A novel substrate for BaSnO3 films journal December 2019
Enhancing electron mobility in La-doped BaSnO 3 thin films by thermal strain to annihilate extended defects journal June 2016
Effects of vacuum annealing on the electron mobility of epitaxial La-doped BaSnO 3 films journal February 2019
Thermally stable pn-junctions based on a single transparent perovskite semiconductor BaSnO3 journal May 2016
Electronic properties of p-type BaSnO3 thin films journal November 2020
High temperature structural phase transitions in SrSnO3 perovskite journal March 2005
Synthesis of SrSnO3 thin films by pulsed laser deposition: Influence of substrate and deposition temperature journal November 2010
Perovskite-type transparent and conductive oxide films: Sb- and Nd-doped SrSnO3 journal July 2011
Optical and transport properties of transparent conducting La-doped SrSnO 3 thin films journal October 2015
Ta doped SrSnO3 epitaxial films as transparent conductive oxide journal September 2017
Band Gap Engineering and Room-Temperature Ferromagnetism by Oxygen Vacancies in SrSnO 3 Epitaxial Films journal July 2018
Wide-Range Band-Gap Tuning and High Electrical Conductivity in La- and Pb-Doped SrSnO3 Epitaxial Films journal June 2019
Electrical and Optical Properties of Nb-doped SrSnO3 Epitaxial Films Deposited by Pulsed Laser Deposition journal August 2020
Tuning of the Optoelectronic Properties for Transparent Oxide Semiconductor ASnO3 by Modulating the Size of A-Ions journal December 2020
High electrical conducting deep-ultraviolet-transparent oxide semiconductor La-doped SrSnO3 exceeding ∼3000 S cm−1 journal January 2020
Combined experimental-theoretical study of electron mobility-limiting mechanisms in SrSnO3 journal November 2021
Achieving highly conductive AlGaN alloys with high Al contents journal August 2002
Si-doped AlxGa1−xN(0.56⩽×⩽1) layers grown by molecular beam epitaxy with ammonia journal September 2005
Progress on n-type doping of AlGaN alloys on AlN single crystal substrates for UV optoelectronic applications journal May 2011
Transport properties of highly conductive n-type Al-rich AlxGa1−xN(x⩾0.7) journal October 2004
Doping and compensation in Al-rich AlGaN grown on single crystal AlN and sapphire by MOCVD journal February 2018
Controlled n-type doping of AlN:Si films grown on 6H-SiC(0001) by plasma-assisted molecular beam epitaxy journal January 2005
Editors' Choice—Si- and Sn-Doped Homoepitaxial β-Ga 2 O 3 Layers Grown by MOVPE on (010)-Oriented Substrates journal October 2016
Electrostatic Control of Insulator–Metal Transition in La-doped SrSnO 3 Films journal January 2019
Depletion Mode MOSFET Using La-Doped BaSnO 3 as a Channel Material journal June 2018
Demonstration of a Depletion-Mode SrSnO3 n-Channel MESFET journal September 2018
SrSnO3 Field-Effect Transistors With Recessed Gate Electrodes journal September 2020
SrSnO₃ Metal-Semiconductor Field-Effect Transistor With GHz Operation journal January 2021
Some Transport Properties of Oxygen-Deficient Single-Crystal Potassium Tantalate (KTa O 3 ) journal March 1965
Discovery of superconductivity in KTaO3 by electrostatic carrier doping journal May 2011
Two-dimensional superconductivity and anisotropic transport at KTaO 3 (111) interfaces journal January 2021
Growth of tantalum oxide and lithium tantalate thin films by molecular beam epitaxy journal August 1995
Origins of n -type doping difficulties in perovskite stannates journal February 2018
Electrical Conductivity in Transparent ZnGa2O4: Reduction and Surface-Layer Structure Transformation journal January 2005
Optical Properties of Zinc Aluminate, Zinc Gallate, and Zinc Aluminogallate Spinels journal March 1998
Ultra-wide bandgap, conductive, high mobility, and high quality melt-grown bulk ZnGa 2 O 4 single crystals journal February 2019
MgGa 2 O 4 as a new wide bandgap transparent semiconducting oxide: growth and properties of bulk single crystals : MgGa journal January 2015
Theoretical and experimental investigation of the electronic properties of the wide band-gap transparent semiconductor MgGa2O4 journal June 2018
Thin film transistors based on ultra-wide bandgap spinel ZnGa2O4 journal May 2020
Optical properties of epitaxial SrHfO3 thin films grown on Si journal November 2007
Artificial ferroelectricity in perovskite superlattices journal November 2004
Field-effect transistors with SrHfO3 as gate oxide journal July 2006
Metal-oxide-semiconductor capacitors with ZrO2 dielectrics grown on In0.53Ga0.47As by chemical beam deposition journal August 2009
Al-doped HfO2/In0.53Ga0.47As metal-oxide-semiconductor capacitors journal April 2011
Two-dimensional electron gas in a modulation-doped SrTiO 3 /Sr(Ti, Zr)O 3 heterostructure journal August 2013
Polymorphism in NaSbO 3 :  Structure and Bonding in Metal Oxides journal March 2004
P -type transparent conducting oxides journal July 2016
Electronic structure of CuCrO 2 thin films grown on Al 2 O 3 (001) by oxygen plasma assisted molecular beam epitaxy journal December 2012
Optical functions of KTaO 3 as determined by spectroscopic ellipsometry and comparison with band structure calculations journal October 2006
Photocatalytic water splitting for hydrogen generation on cubic, orthorhombic, and tetragonal KNbO3 microcubes journal January 2013
p-Type Ultrawide-Band-Gap Spinel ZnGa 2 O 4 : New Perspectives for Energy Electronics journal March 2020
Oxide interfaces for novel electronic applications journal February 2014