Particle-in-Cell Simulations With Fluid Metastable Atoms in Capacitive Argon Discharges: Electron Elastic Scattering and Plasma Density Profile Transition

Wen, De-Qi; Krek, Janez; Gudmundsson, Jon Tomas; Kawamura, Emi; Lieberman, Michael A.; Verboncoeur, John P.

doi:10.1109/tps.2022.3174401

Particle-in-Cell Simulations With Fluid Metastable Atoms in Capacitive Argon Discharges: Electron Elastic Scattering and Plasma Density Profile Transition

Journal Article · 01 September 2022 · IEEE Transactions on Plasma Science

DOI:https://doi.org/10.1109/tps.2022.3174401· OSTI ID:1980565

^[1]; ^[2]; ^[3]; Kawamura, Emi ^[4]; Lieberman, Michael A. ^[4]; ^[1]

Department of Computational Mathematics Science and Engineering, and the Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, USA
Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, USA
Science Institute, University of Iceland, Reykjavik, Iceland
Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA

Not provided.

Research Organization:: Michigan State Univ., East Lansing, MI (United States)

Sponsoring Organization:: USDOE Office of Science (SC)

DOE Contract Number:: SC0022078

OSTI ID:: 1980565

Journal Information:: IEEE Transactions on Plasma Science, Vol. 50, Issue 9; ISSN 0093-3813

Publisher:: IEEE

Country of Publication:: United States

Language:: English

References (40)

Phase modulation in pulsed dual-frequency capacitively coupled plasmas Wen, De-Qi; Zhang, Quan-Zhi; Jiang, Wei Journal of Applied Physics, Vol. 115, Issue 23 https://doi.org/10.1063/1.4884225	journal	June 2014
Edge-to-center density ratios in low-temperature plasmas Lafleur, T.; Chabert, P. Plasma Sources Science and Technology, Vol. 24, Issue 2 https://doi.org/10.1088/0963-0252/24/2/025017	journal	March 2015
Electron heating in capacitively coupled plasmas revisited Lafleur, T.; Chabert, P.; Booth, J. P. Plasma Sources Science and Technology, Vol. 23, Issue 3 https://doi.org/10.1088/0963-0252/23/3/035010	journal	May 2014
Mersenne twister: a 623-dimensionally equidistributed uniform pseudo-random number generator Matsumoto, Makoto; Nishimura, Takuji ACM Transactions on Modeling and Computer Simulation, Vol. 8, Issue 1 https://doi.org/10.1145/272991.272995	journal	January 1998
Tables of 64-bit Mersenne twisters Nishimura, Takuji ACM Transactions on Modeling and Computer Simulation, Vol. 10, Issue 4 https://doi.org/10.1145/369534.369540	journal	October 2000
On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric Heil, Brian G.; Czarnetzki, Uwe; Brinkmann, Ralf Peter Journal of Physics D: Applied Physics, Vol. 41, Issue 16 https://doi.org/10.1088/0022-3727/41/16/165202	journal	July 2008
Intrasheath electron dynamics in low pressure capacitively coupled plasmas Vass, Máté; Derzsi, Aranka; Schulze, Julian Plasma Sources Science and Technology, Vol. 30, Issue 3 https://doi.org/10.1088/1361-6595/abe728	journal	March 2021
2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms Wang, Li; Hartmann, Peter; Donkó, Zoltán Plasma Sources Science and Technology, Vol. 30, Issue 5 https://doi.org/10.1088/1361-6595/abf31d	journal	May 2021
Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges Wang, Li; Wen, De-Qi; Zhang, Quan-Zhi Plasma Sources Science and Technology, Vol. 28, Issue 5 https://doi.org/10.1088/1361-6595/ab17ae	journal	May 2019
A Monte Carlo collision model for the particle-in-cell method: applications to argon and oxygen discharges Vahedi, V.; Surendra, M. Computer Physics Communications, Vol. 87, Issue 1-2 https://doi.org/10.1016/0010-4655(94)00171-W	journal	May 1995
Avalanche induced rapid impedance change and electron power absorption during gas breakdown under radio-frequency excitation Liu, Yong-Xin; Wang, Xiang-Yu; Zhang, Quan-Zhi Plasma Sources Science and Technology, Vol. 29, Issue 12 https://doi.org/10.1088/1361-6595/abcc7a	journal	December 2020
Particle simulation methods for studies of low-pressure plasma sources Donkó, Zoltán Plasma Sources Science and Technology, Vol. 20, Issue 2 https://doi.org/10.1088/0963-0252/20/2/024001	journal	April 2011
Analysis of the excited argon atoms in the GEC RF reference cell by means of one-dimensional PIC simulations Lauro-Taroni, L.; Turner, M. M.; Braithwaite, N. StJ Journal of Physics D: Applied Physics, Vol. 37, Issue 16 https://doi.org/10.1088/0022-3727/37/16/002	journal	July 2004
Influence of metastable atoms in low pressure magnetized radio-frequency argon discharges Zheng, Bocong; Fu, Yangyang; Wen, De-qi Journal of Physics D: Applied Physics, Vol. 53, Issue 43 https://doi.org/10.1088/1361-6463/ab9f68	journal	July 2020
Benchmarked and upgraded particle-in-cell simulations of a capacitive argon discharge at intermediate pressure: the role of metastable atoms Wen, De-Qi; Krek, Janez; Gudmundsson, Jon Tomas Plasma Sources Science and Technology, Vol. 30, Issue 10 https://doi.org/10.1088/1361-6595/ac1b22	journal	October 2021
Simulation benchmarks for low-pressure plasmas: Capacitive discharges Turner, M. M.; Derzsi, A.; Donkó, Z. Physics of Plasmas, Vol. 20, Issue 1 https://doi.org/10.1063/1.4775084	journal	January 2013
Surface effects in a capacitive argon discharge in the intermediate pressure regime Gudmundsson, J. T.; Krek, Janez; Wen, De-Qi Plasma Sources Science and Technology, Vol. 30, Issue 12 https://doi.org/10.1088/1361-6595/ac3ba1	journal	December 2021
Electron anisotropic scattering in gases: A formula for Monte Carlo simulations Okhrimovskyy, A.; Bogaerts, A.; Gijbels, R. Physical Review E, Vol. 65, Issue 3 https://doi.org/10.1103/PhysRevE.65.037402	journal	February 2002
eduPIC: an introductory particle based code for radio-frequency plasma simulation Donkó, Zoltán; Derzsi, Aranka; Vass, Máté Plasma Sources Science and Technology, Vol. 30, Issue 9 https://doi.org/10.1088/1361-6595/ac0b55	journal	September 2021
Particle simulation of plasmas: review and advances Verboncoeur, J. P. Plasma Physics and Controlled Fusion, Vol. 47, Issue 5A https://doi.org/10.1088/0741-3335/47/5A/017	journal	April 2005
A benchmark study of a capacitively coupled oxygen discharge of the oopd1 particle-in-cell Monte Carlo code Gudmundsson, J. T.; Kawamura, E.; Lieberman, M. A. Plasma Sources Science and Technology, Vol. 22, Issue 3 https://doi.org/10.1088/0963-0252/22/3/035011	journal	May 2013
Continuum modeling of radio‐frequency glow discharges. II. Parametric studies and sensitivity analysis Gogolides, Evangelos; Sawin, Herbert H. Journal of Applied Physics, Vol. 72, Issue 9 https://doi.org/10.1063/1.352251	journal	November 1992
Tailored voltage waveforms applied to a capacitively coupled chlorine discharge Skarphedinsson, G. A.; Gudmundsson, J. T. Plasma Sources Science and Technology, Vol. 29, Issue 8 https://doi.org/10.1088/1361-6595/aba920	journal	August 2020
Fluid simulations of glow discharges: Effect of metastable atoms in argon Lymberopoulos, Dimitris P.; Economou, Demetre J. Journal of Applied Physics, Vol. 73, Issue 8 https://doi.org/10.1063/1.352926	journal	April 1993
Fluid simulation for influence of metastable atoms on the characteristics of capacitively coupled argon plasmas Zhang, Yu-Ru; Xu, Xiang; Wang, You-Nian Physics of Plasmas, Vol. 17, Issue 3 https://doi.org/10.1063/1.3368862	journal	March 2010
Direct calculation of time-periodic states of continuum models of radio-frequency plasmas Gogolides, E.; Sawin, H. H.; Brown, R. A. Chemical Engineering Science, Vol. 47, Issue 15-16 https://doi.org/10.1016/0009-2509(92)85133-V	journal	October 1992
Simultaneous Potential and Circuit Solution for 1D Bounded Plasma Particle Simulation Codes Verboncoeur, J. P.; Alves, M. V.; Vahedi, V. Journal of Computational Physics, Vol. 104, Issue 2 https://doi.org/10.1006/jcph.1993.1034	journal	February 1993
Particle-in-cell simulations and passive bulk model of collisional capacitive discharge Kawamura, Emi; Lieberman, Michael A.; Lichtenberg, Allan J. Journal of Vacuum Science & Technology A, Vol. 38, Issue 2 https://doi.org/10.1116/1.5135575	journal	March 2020
Electron dynamics in low pressure capacitively coupled radio frequency discharges Wilczek, S.; Schulze, J.; Brinkmann, R. P. Journal of Applied Physics, Vol. 127, Issue 18 https://doi.org/10.1063/5.0003114	journal	May 2020
Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. II. Comparisons with laboratory measurements of electron energy distribution functions Vahedi, V.; Birdsall, C. K.; Lieberman, M. A. Plasma Sources Science and Technology, Vol. 2, Issue 4 https://doi.org/10.1088/0963-0252/2/4/007	journal	November 1993
Principles of Plasma Discharges and Materials Processing Lieberman, Michael A.; Lichtenberg, Allan J. https://doi.org/10.1002/0471724254	book	January 2005
Simulations of multipactor breakdown in low-pressure background gas for angled dielectrics in DC Aldan, Manuel Thomas P.; Verboncoeur, John P. IEEE Transactions on Dielectrics and Electrical Insulation, Vol. 20, Issue 4 https://doi.org/10.1109/TDEI.2013.6571436	journal	August 2013
Observation of multilayer-structured discharge in plasma ionization breakdown Wen, De-Qi; Zhang, Peng; Krek, Janez Applied Physics Letters, Vol. 119, Issue 26 https://doi.org/10.1063/5.0076519	journal	December 2021
Transition of window breakdown from vacuum multipactor discharge to rf plasma Kim, H. C.; Verboncoeur, J. P. Physics of Plasmas, Vol. 13, Issue 12 https://doi.org/10.1063/1.2403782	journal	December 2006
Particle-in-cell simulations of the alpha and gamma modes in collisional nitrogen capacitive discharges Kawamura, E.; Lieberman, M. A.; Lichtenberg, A. J. Plasma Sources Science and Technology, Vol. 30, Issue 3 https://doi.org/10.1088/1361-6595/abde22	journal	March 2021
Temporal single-surface multipactor dynamics under obliquely incident linearly polarized electric field Wen, De-Qi; Zhang, Peng; Fu, Yangyang Physics of Plasmas, Vol. 26, Issue 12 https://doi.org/10.1063/1.5126438	journal	December 2019
Temporal evolution of plasma characteristics in synchronized dual-level RF pulsed capacitively coupled discharge Ma, Fang-Fang; Zhang, Quan-Zhi; Schulze, Julian Plasma Sources Science and Technology, Vol. 30, Issue 10 https://doi.org/10.1088/1361-6595/ac2675	journal	October 2021
Suppression of single-surface multipactor discharges due to non-sinusoidal transverse electric field Wen, De-Qi; Iqbal, Asif; Zhang, Peng Physics of Plasmas, Vol. 26, Issue 9 https://doi.org/10.1063/1.5111734	journal	September 2019
Electron heating mode transitions in a low pressure capacitively coupled oxygen discharge Gudmundsson, J. T.; Proto, A. Plasma Sources Science and Technology, Vol. 28, Issue 4 https://doi.org/10.1088/1361-6595/ab1463	journal	April 2019
A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge Huang, Shuo; Gudmundsson, J. T. Plasma Sources Science and Technology, Vol. 22, Issue 5 https://doi.org/10.1088/0963-0252/22/5/055020	journal	September 2013

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