Q Control of an AFM Microcantilever With Double-Stack AlN Sensors and Actuators

Mahmoodi Nasrabadi, Hazhir; Mahdavi, Mohammad; Moheimani, S. O.  Reza

doi:10.1109/jsen.2022.3141431

Q Control of an AFM Microcantilever With Double-Stack AlN Sensors and Actuators

Journal Article · 01 March 2022 · IEEE Sensors Journal

DOI:https://doi.org/10.1109/jsen.2022.3141431· OSTI ID:1980426

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Erik Johnsson School of Engineering and Computer Science, The University of Texas at Dallas, Richardson, TX, USA; OSTI
Erik Johnsson School of Engineering and Computer Science, The University of Texas at Dallas, Richardson, TX, USA

Not provided.

Research Organization:: Univ. of Texas at Dallas, Richardson, TX (United States)

Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE)

DOE Contract Number:: EE0008322

OSTI ID:: 1980426

Journal Information:: IEEE Sensors Journal, Journal Name: IEEE Sensors Journal Journal Issue: 5 Vol. 22; ISSN 1530-437X

Publisher:: IEEE

Country of Publication:: United States

Language:: English

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