Plasma-Assisted Epitaxy of Piezoelectric ScxAl1-xN Films on Sapphire for Use in Harsh-Environment Microwave Acoustic Sensors

Greenslit, Morton; da Cunha, Mauricio Pereira; Lad, Robert J.

doi:10.1007/s11664-021-09425-2

Plasma-Assisted Epitaxy of Piezoelectric ScxAl1-xN Films on Sapphire for Use in Harsh-Environment Microwave Acoustic Sensors

Journal Article · 22 January 2022 · Journal of Electronic Materials

DOI:https://doi.org/10.1007/s11664-021-09425-2· OSTI ID:1976731

; da Cunha, Mauricio Pereira; Lad, Robert J.

Not provided.

Research Organization:: Univ. of Maine, Orono, ME (United States)

Sponsoring Organization:: USDOE Office of Fossil Energy (FE)

DOE Contract Number:: FE0031550

OSTI ID:: 1976731

Journal Information:: Journal of Electronic Materials, Vol. 51, Issue 4; ISSN 0361-5235

Publisher:: Springer

Country of Publication:: United States

Language:: English

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