Off-specular reflectivity study of sputter-deposition of platinum during growth
Conference
·
OSTI ID:196554
A series of off-specular diffuse scattering measurements were performed by scanning the detector arm parallel to the sample surface during growth of platinum films on polished silicon substrates. During early stage of growth, we observe a halo of diffuse scattering around the specular reflection which is similar to Henzler`s ring. A model of random islands was developed to explain the halo of diffuse scattering. During late growth, the film surface was consistent with partially self-affine surface.
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 196554
- Report Number(s):
- ANL/MSD/CP-88067; CONF-9506314-1; ON: DE96005535; TRN: 96:001714
- Resource Relation:
- Conference: 4. international conference on surface x-ray and neutron scattering, Lake Geneva, WI (United States), 25-30 Jun 1995; Other Information: PBD: Aug 1995
- Country of Publication:
- United States
- Language:
- English
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