Comparative diagnostics of ArF- and KrF-laser generated carbon plumes used for amorphous diamond-like carbon film deposition
- Inst. of Spectroscopy, Troitsk (Russian Federation)
- Oak Ridge National Lab., TN (United States)
- Univ. of Glasgow (United Kingdom)
A comparative study of ArF- and KrF-laser generated carbon plasmas has been performed under pulsed laser deposition conditions of amorphous diamond-like carbon (DLC) films. Gated-ICCD species-resolved imaging, luminescence spectroscopy and ion probe diagnostics have revealed distinct differences between the carbon plumes generated by ArF- and KrF-lasers. KrF-laser (6.7 J/cm{sup 2}) irradiation produces a less energetic carbon plasma containing larger amounts of luminescent C{sub 2} compared with ArF-laser ablation at the same energy fluence. Spectroscopic ellipsometry and EELS analysis of the DLC films deposited on Si <100> and NaCl substrates were utilized to characterize the high quality ArF- and KrF-laser deposited films (up to 84% of sp{sup 3} bonded carbon for 7 J/cm{sup 2}-ArF-laser DLC film). The more energetic and highly-atomized ArF-laser carbon plasma appears to be responsible for the better diamond-like properties.
- Research Organization:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 195652
- Report Number(s):
- CONF-9505219-3; ON: DE96005741; TRN: AHC29605%%27
- Resource Relation:
- Conference: 3. international conference on laser ablation (COLA `95), Strasbourg (France), 22-26 May 1995; Other Information: PBD: May 1995
- Country of Publication:
- United States
- Language:
- English
Similar Records
Species-resolved imaging and gated photon counting spectroscopy of laser ablation plume dynamics during KrF- and ArF-laser PLD of amorphous diamond films
Deposition of diamond-like carbon films by excimer lasers using frozen source gases