Method and apparatus for implementing ultra-high stability stages with combined degrees of freedom for multiple axes of motion

Patent · 26 July 2022

OSTI ID:1924925

Preissner, Curt Alfred; Bean, Sunil Jeffrey; Rose, Volker

A method and apparatus are provided for implementing an ultra-high stability stage with combined degrees of freedom for multiple axes of motion. The ultra-high stability stage includes a base, a driving wedge supported by the base and a following wedge supported by the driving wedge. The base and each wedge are formed of a selected stable material having predefined rigidity and low thermal expansion coefficient. Integrated air bearings, respective driving mechanics associated with each of the wedges and guiding components having selected degrees of freedom enable movement about multiple axes of motion, such as X, Y, Z translation axes, and rotation X and rotation Y axes. Another ultra-high stability stage with combined degrees of freedom for multiple axes of motion includes an intermediate wedge between the driving wedge and the following wedge to enable additional movement about a rotation X axis.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC02-06CH11357
• Assignee: Uchicago Argonne, LLC (Chicago, IL)
• Patent Number(s): 11,396,974
• Application Number: 17/034,133
• OSTI ID: 1924925
• Country of Publication: United States
• Language: English