Time-resolved chemical studies via time-of-flight secondary ion mass spectrometry
Patent
·
OSTI ID:1893012
A method of performing time-of-flight secondary ion mass spectrometry on a sample includes the step of directing a beam of primary ions to the sample, and stimulating the migration of ions within the sample while the beam of primary ions is directed at the sample. The stimulation of the ions is cycled between a stimulation state and a lower stimulation state. Secondary ions emitted from the sample by the beam of primary ions are collected in a time-of-flight mass spectrometer. Time-of-flight secondary ion mass spectrometry is then performed on the secondary ions. A system for performing time-of-flight secondary ion mass spectrometry on a sample is also disclosed.
- Research Organization:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC05-00OR22725
- Assignee:
- UT-Battelle, LLC (Oak Ridge, TN); University of Tennessee Research Foundation (Knoxville, TN)
- Patent Number(s):
- 11,355,336
- Application Number:
- 17/174,968
- OSTI ID:
- 1893012
- Country of Publication:
- United States
- Language:
- English
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