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System and method for repeated metal deposition-dewetting steps to form a nano-particle etching mask producing thicker layer of engraved metasurface

Patent ·
OSTI ID:1892796
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A method and system is disclosed for creating an optical component having a spatially controlled refractive index and uniform anti-reflective layer. The method may involve alternately depositing and dewetting two or more thin metal material layers on the substrate to form a mask having a spatially varying nano-particle distribution, and with an increased thickness beyond what could be achieved using a single, thick layer of the same material. The substrate may then be etched, using the mask, to imprint a spatially patterned nanostructure pattern on a surface the substrate in accordance with the mask.
Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC52-07NA27344
Assignee:
Lawrence Livermore National Security, LLC (Livermore, CA)
Patent Number(s):
11,294,103
Application Number:
16/875,337
OSTI ID:
1892796
Country of Publication:
United States
Language:
English

References (11)

Pinning of a Contact Line on Nanometric Steps during the Dewetting of a Terraced Substrate journal August 2005
Durable, superhydrophobic, antireflection, and low haze glass surfaces using scalable metal dewetting nanostructuring journal May 2013
Templating of Thin Films Induced by Dewetting on Patterned Surfaces journal May 2001
Repeated Solid-state Dewetting of Thin Gold Films for Nanogap-rich Plasmonic Nanoislands journal October 2015
Nanostructure Formation by controlled dewetting on patterned substrates: A combined theoretical, modeling and experimental study journal September 2016
Fabrication of GaN-based nanorod light emitting diodes using self-assemble nickel nano-mask and inductively coupled plasma reactive ion etching journal October 2004
Dewetting of Thin Films on Periodic Physically and Chemically Patterned Surfaces journal February 2002
Recent advances in antireflective surfaces based on nanostructure arrays journal January 2015
Gold nanoisland arrays by repeated deposition and post-deposition annealing for surface-enhanced Raman spectroscopy journal August 2013
Scalable Light-Printing of Substrate-Engraved Free-Form Metasurfaces journal May 2019
Plasmonic Optical Fiber Sensor Based on Double Step Growth of Gold Nano-Islands journal April 2018

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