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Self-alignment features for III-V ridge process and angled facet die

Patent ·
OSTI ID:1892584
A method of forming a laser including device is provided that in one embodiment includes providing a laser chip including at least one ridge structure that provides an alignment features. The method further includes bonding a type IV photonics chip to the laser chip, wherein a vertical alignment feature from the type IV photonics chip is inserted in a recess relative to the at least one ridge structure that provides the alignment features of the laser structure.
Research Organization:
International Business Machines Corp., Armonk, NY (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AR0000540
Assignee:
International Business Machines Corporation (Armonk, NY)
Patent Number(s):
11,239,631
Application Number:
16/584,218
OSTI ID:
1892584
Country of Publication:
United States
Language:
English

References (2)

Toward High-Yield 3D Self-Alignment of Flip-Chip Assemblies via Solder Surface Tension conference May 2016
A Novel Approach to Photonic Packaging Leveraging Existing High-Throughput Microelectronic Facilities journal November 2016

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