Self-Assembled Monolayers for Silicon Passivated Contacts
We present the application of self assembled monolayers (SAM) produced from hexamethyldisilazane (HMDS), to the polysilicon/tunneling SiO2 interface as well as the external surface for application to silicon passivated contact solar cells. By immersing tunnel SiO2 on cSi in the HMDS solution, almost complete trimethylsilyl coverage is achieved. This provides better adhesion for PECVD grown a-Si:H due to the presence of carbon, and subsequent high temperature crystallization does not lead to blistering, nor degrade surface or bulk passivation. This is demonstrated on passivated contact solar cells and symmetric structures. Furthermore, an HMDS functionalized surface is resistant to HF and TMAH etchants, but can be patterned with UV light, creating a selective mask template for subsequent wet etch.
- Research Organization:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Organization:
- USDOE Office of Energy Efficiency and Renewable Energy (EERE), Renewable Power Office. Solar Energy Technologies Office
- DOE Contract Number:
- AC36-08GO28308
- OSTI ID:
- 1890131
- Report Number(s):
- NREL/CP-5900-80514; MainId:43716; UUID:78b702bb-8b99-4654-abfb-1b04a1cea90f; MainAdminID:62882
- Resource Relation:
- Conference: Presented at SiliconPV 2021: The 11th International Conference on Crystalline Silicon Photovoltaics, 19-23 April 2021, Hamelin, Germany
- Country of Publication:
- United States
- Language:
- English
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