Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition.
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- NA0003525
- OSTI ID:
- 1877517
- Report Number(s):
- SAND2021-7547C; 697315
- Resource Relation:
- Conference: Proposed for presentation at the 21st International Conference on Atomic Layer Deposition held June 27-30, 2021 in Virtual,
- Country of Publication:
- United States
- Language:
- English
Similar Records
Area-Selective Atomic Layer Deposition Templated by Atomic Precision Fabrication.
Atomic precision advanced manufacturing (APAM) of ultra-doped nanostructures for advanced CMOS devices and interconnects.
Modeling and Assessment of Atomic Precision Advanced Manufacturing (APAM) Enabled Vertical Tunneling Field Effect Transistor.
Conference
·
2022
·
OSTI ID:2002069
+6 more
Atomic precision advanced manufacturing (APAM) of ultra-doped nanostructures for advanced CMOS devices and interconnects.
Conference
·
2021
·
OSTI ID:1863854
+8 more
Modeling and Assessment of Atomic Precision Advanced Manufacturing (APAM) Enabled Vertical Tunneling Field Effect Transistor.
Conference
·
2021
·
OSTI ID:1867272
+9 more