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Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition.

Conference ·
DOI:https://doi.org/10.2172/1877517· OSTI ID:1877517
Abstract not provided.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
NA0003525;
OSTI ID:
1877517
Report Number(s):
SAND2021-7547C; 697315
Resource Type:
Conference presentation
Conference Information:
Proposed for presentation at the 21st International Conference on Atomic Layer Deposition held June 27-30, 2021 in Virtual,
Country of Publication:
United States
Language:
English

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