Role of Fluoride Doping in Low-Temperature Combustion-Synthesized ZrO[subscript x] Dielectric Films

Sil, Aritra; Goldfine, Elise A.; Huang, Wei; Bedzyk, Michael J.; Medvedeva, Julia E.; Facchetti, Antonio; Marks, Tobin J.

doi:10.1021/acsami.1c22853

Title: Role of Fluoride Doping in Low-Temperature Combustion-Synthesized ZrO[subscript x] Dielectric Films

Journal Article · 01 March 2022 · ACS Appl. Mater. Interfaces

DOI:https://doi.org/10.1021/acsami.1c22853· OSTI ID:1869891

Sil, Aritra; Goldfine, Elise A.; Huang, Wei; Bedzyk, Michael J.; Medvedeva, Julia E.; Facchetti, Antonio; Marks, Tobin J.

Cite

Export

Save

Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)

Sponsoring Organization:: DOE - Office Of Science; DOE - BASIC ENERGY SCIENCES

OSTI ID:: 1869891

Journal Information:: ACS Appl. Mater. Interfaces, Vol. 14, Issue (10)

Country of Publication:: United States

Language:: ENGLISH

References (51)

Self-Assembled Nanodielectrics for Solution-Processed Top-Gate Amorphous IGZO Thin-Film Transistors Stallings, Katie; Smith, Jeremy; Chen, Yao ACS Applied Materials & Interfaces, Vol. 13, Issue 13 https://doi.org/10.1021/acsami.1c00249	journal	March 2021
Flexible and stretchable metal oxide nanofiber networks for multimodal and monolithically integrated wearable electronics Wang, Binghao; Thukral, Anish; Xie, Zhaoqian Nature Communications, Vol. 11, Issue 1 https://doi.org/10.1038/s41467-020-16268-8	journal	May 2020
The development of flexible integrated circuits based on thin-film transistors Myny, Kris Nature Electronics, Vol. 1, Issue 1 https://doi.org/10.1038/s41928-017-0008-6	journal	January 2018
Low-voltage high-performance flexible digital and analog circuits based on ultrahigh-purity semiconducting carbon nanotubes Lei, Ting; Shao, Lei-Lai; Zheng, Yu-Qing Nature Communications, Vol. 10, Issue 1 https://doi.org/10.1038/s41467-019-10145-9	journal	May 2019
Wearable 1 V operating thin-film transistors with solution-processed metal-oxide semiconductor and dielectric films fabricated by deep ultra-violet photo annealing at low temperature Yu, Byoung-Soo; Jeon, Jun-Young; Kang, Byeong-Cheol Scientific Reports, Vol. 9, Issue 1 https://doi.org/10.1038/s41598-019-44948-z	journal	June 2019
Wearable temperature sensors based on lanthanum-doped aluminum-oxide dielectrics operating at low-voltage and high-frequency for healthcare monitoring systems Park, Sang-Joon; Jeon, Jun-Young; Kang, Byoung-Cheol Ceramics International, Vol. 47, Issue 4 https://doi.org/10.1016/j.ceramint.2020.10.023	journal	February 2021
Low-Voltage, Full-Swing InGaZnO-Based Inverters Enabled by Solution-Processed, Ultra-Thin Al _x O _y Cai, Wensi; Zhang, Jiawei; Wilson, Joshua IEEE Electron Device Letters, Vol. 40, Issue 8 https://doi.org/10.1109/led.2019.2924714	journal	August 2019
Spray‐Pyrolyzed High‐k Zirconium‐Aluminum‐Oxide Dielectric for High Performance Metal‐Oxide Thin‐Film Transistors for Low Power Displays Islam, Md Mobaidul; Saha, Jewel Kumer; Hasan, Md. Mehedi Advanced Materials Interfaces, Vol. 8, Issue 16 https://doi.org/10.1002/admi.202100600	journal	July 2021
Fully Solution-Processed Low-Voltage Aqueous In ₂ O ₃ Thin-Film Transistors Using an Ultrathin ZrO _x Dielectric Liu, Ao; Liu, Guo Xia; Zhu, Hui Hui ACS Applied Materials & Interfaces, Vol. 6, Issue 20 https://doi.org/10.1021/am505602w	journal	October 2014
Low-voltage and high-performance field-effect transistors based on Zn _x Sn _1−x O nanofibers with a ZrO _x dielectric Wang, Zhen; Meng, You; Cui, Youchao Nanoscale, Vol. 10, Issue 30 https://doi.org/10.1039/c8nr03887b	journal	January 2018
Fully solution-induced high performance indium oxide thin film transistors with ZrO _x high-k gate dielectrics Zhu, Li; He, Gang; Lv, Jianguo RSC Advances, Vol. 8, Issue 30 https://doi.org/10.1039/c8ra02108b	journal	January 2018
Photo-patternable high-k ZrOx dielectrics prepared using zirconium acrylate for low-voltage-operating organic complementary inverters Jeong, Yong Jin; Yun, Dong-Jin; Nam, Sooji Organic Electronics, Vol. 33 https://doi.org/10.1016/j.orgel.2016.03.005	journal	June 2016
Printable Organic‐Inorganic Nanoscale Multilayer Gate Dielectrics for Thin‐Film Transistors Enabled by a Polymeric Organic Interlayer Chen, Yao; Zhuang, Xinming; Goldfine, Elise A. Advanced Functional Materials, Vol. 30, Issue 40 https://doi.org/10.1002/adfm.202005069	journal	August 2020
Solution Processed Metal Oxide High-κ Dielectrics for Emerging Transistors and Circuits Liu, Ao; Zhu, Huihui; Sun, Huabin Advanced Materials, Vol. 30, Issue 33 https://doi.org/10.1002/adma.201706364	journal	June 2018
High- k Gate Dielectrics for Emerging Flexible and Stretchable Electronics Wang, Binghao; Huang, Wei; Chi, Lifeng Chemical Reviews, Vol. 118, Issue 11 https://doi.org/10.1021/acs.chemrev.8b00045	journal	May 2018
Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources Ritala, Mikko; Kukli, Kaupo; Raisanen, Petri Science, Vol. 288, Issue 5464, p. 319-321 https://doi.org/10.1126/science.288.5464.319	journal	April 2000
Solution-based Fabrication of High-κ Gate Dielectrics for Next-Generation Metal-Oxide Semiconductor Transistors Aoki, Y.; Kunitake, T. Advanced Materials, Vol. 16, Issue 2 https://doi.org/10.1002/adma.200305731	journal	January 2004
Structure and Dielectric Property of High-k ZrO2 Films Grown by Atomic Layer Deposition Using Tetrakis(Dimethylamido)Zirconium and Ozone Liu, Junqing; Li, Junpeng; Wu, Jianzhuo Nanoscale Research Letters, Vol. 14, Issue 1 https://doi.org/10.1186/s11671-019-2989-8	journal	May 2019
Growth and dielectric properties of tetragonal ZrO ₂ films by limited reaction sputtering Zhou, Y.; Kojima, N.; Sasaki, K. Journal of Physics D: Applied Physics, Vol. 41, Issue 17 https://doi.org/10.1088/0022-3727/41/17/175414	journal	August 2008
Reactive magnetron sputtering of thin films: present status and trends Musil, J.; Baroch, P.; Vlček, J. Thin Solid Films, Vol. 475, Issue 1-2 https://doi.org/10.1016/j.tsf.2004.07.041	journal	March 2005
Substrate Biasing Effect on the Physical Properties of Reactive RF-Magnetron-Sputtered Aluminum Oxide Dielectric Films on ITO Glasses Liang, Ling Yan; Cao, Hong Tao; Liu, Quan ACS Applied Materials & Interfaces, Vol. 6, Issue 4 https://doi.org/10.1021/am4055589	journal	February 2014
Enhanced dielectric properties of ZrO ₂ thin films prepared in nitrogen ambient by pulsed laser deposition Zhu, J.; Li, T. L.; Pan, B. Journal of Physics D: Applied Physics, Vol. 36, Issue 4 https://doi.org/10.1088/0022-3727/36/4/310	journal	January 2003
Improved performance of InGaZnO thin-film transistors with Ta2O5/Al2O3 stack deposited using pulsed laser deposition Geng, G. Z.; Liu, G. X.; Shan, F. K. Current Applied Physics, Vol. 14 https://doi.org/10.1016/j.cap.2013.12.006	journal	March 2014
Recent Advances of Solution-Processed Metal Oxide Thin-Film Transistors Xu, Wangying; Li, Hao; Xu, Jian-Bin ACS Applied Materials & Interfaces, Vol. 10, Issue 31 https://doi.org/10.1021/acsami.7b16010	journal	March 2018
A Review of Low‐Temperature Solution‐Processed Metal Oxide Thin‐Film Transistors for Flexible Electronics Park, Jeong Woo; Kang, Byung Ha; Kim, Hyun Jae Advanced Functional Materials, Vol. 30, Issue 20 https://doi.org/10.1002/adfm.201904632	journal	September 2019
Solution-Processed All-Oxide Transparent High-Performance Transistors Fabricated by Spray-Combustion Synthesis Wang, Binghao; Yu, Xinge; Guo, Peijun Advanced Electronic Materials, Vol. 2, Issue 4 https://doi.org/10.1002/aelm.201500427	journal	January 2016
Sol-gel metal oxide dielectrics for all-solution-processed electronics Park, Sungjun; Kim, Chang-Hyun; Lee, Won-June Materials Science and Engineering: R: Reports, Vol. 114 https://doi.org/10.1016/j.mser.2017.01.003	journal	April 2017
Identification of dipole disorder in low temperature solution processed oxides: its utility and suppression for transparent high performance solution-processed hybrid electronics Banger, Kulbinder; Warwick, Christopher; Lang, Jiang Chemical Science, Vol. 7, Issue 10 https://doi.org/10.1039/c6sc01962e	journal	January 2016
Frequency-Stable Ionic-Type Hybrid Gate Dielectrics for High Mobility Solution-Processed Metal-Oxide Thin-Film Transistors Heo, Jae; Choi, Seungbeom; Jo, Jeong-Wan Materials, Vol. 10, Issue 6 https://doi.org/10.3390/ma10060612	journal	June 2017
Diffusion-Controlled Faradaic Charge Storage in High-Performance Solid Electrolyte-Gated Zinc Oxide Thin-Film Transistors Balakrishna Pillai, Premlal; Kumar, Ashwani; Song, Xiaoyao ACS Applied Materials & Interfaces, Vol. 10, Issue 11 https://doi.org/10.1021/acsami.7b14768	journal	March 2018
Frequency-Agile Low-Temperature Solution-Processed Alumina Dielectrics for Inorganic and Organic Electronics Enhanced by Fluoride Doping Zhuang, Xinming; Patel, Sawankumar; Zhang, Chi Journal of the American Chemical Society, Vol. 142, Issue 28 https://doi.org/10.1021/jacs.0c05161	journal	June 2020
Low-temperature, nontoxic water-induced high-k zirconium oxide dielectrics for low-voltage, high-performance oxide thin-film transistors Zhu, Chundan; Liu, Ao; Liu, Guoxia Journal of Materials Chemistry C, Vol. 4, Issue 45 https://doi.org/10.1039/c6tc02607a	journal	January 2016
Low-Temperature, High-Performance Solution-Processed Thin-Film Transistors with Peroxo-Zirconium Oxide Dielectric Park, Jee Ho; Yoo, Young Bum; Lee, Keun Ho ACS Applied Materials & Interfaces, Vol. 5, Issue 2 https://doi.org/10.1021/am3022625	journal	January 2013
Expeditious, scalable solution growth of metal oxide films by combustion blade coating for flexible electronics Wang, Binghao; Guo, Peijun; Zeng, Li Proceedings of the National Academy of Sciences, Vol. 116, Issue 19 https://doi.org/10.1073/pnas.1901492116	journal	April 2019
Structure–Charge Transport Relationships in Fluoride-Doped Amorphous Semiconducting Indium Oxide: Combined Experimental and Theoretical Analysis Sil, Aritra; Avazpour, Laleh; Goldfine, Elise A. Chemistry of Materials, Vol. 32, Issue 2 https://doi.org/10.1021/acs.chemmater.9b04257	journal	December 2019
Fluorination of Epitaxial Oxides: Synthesis of Perovskite Oxyfluoride Thin Films Moon, Eun Ju; Xie, Yujun; Laird, Eric D. Journal of the American Chemical Society, Vol. 136, Issue 6 https://doi.org/10.1021/ja410954z	journal	January 2014
Indium-Based Ultraviolet-Transparent Electroconductive Oxyfluoride InOF: Ambient-Pressure Synthesis and Unique Electronic Properties in Comparison with In ₂ O ₃ Mori, Tatsuya; Kajihara, Koichi; Kanamura, Kiyoshi Journal of the American Chemical Society, Vol. 135, Issue 35 https://doi.org/10.1021/ja405889m	journal	August 2013
Solubility limit of nitrogen in Fe–Cr–C–N alloy melt under reduced N2 partial pressure Paek, Min-Kyu; Lindberg, Daniel; Pak, Jong-Jin Vacuum, Vol. 182 https://doi.org/10.1016/j.vacuum.2020.109726	journal	December 2020
Na Doping in PbTe: Solubility, Band Convergence, Phase Boundary Mapping, and Thermoelectric Properties Jood, Priyanka; Male, James P.; Anand, Shashwat Journal of the American Chemical Society, Vol. 142, Issue 36 https://doi.org/10.1021/jacs.0c07067	journal	August 2020
Carbohydrate-Assisted Combustion Synthesis To Realize High-Performance Oxide Transistors Wang, Binghao; Zeng, Li; Huang, Wei Journal of the American Chemical Society, Vol. 138, Issue 22 https://doi.org/10.1021/jacs.6b02309	journal	May 2016
Dielectric breakdown mechanisms in gate oxides Lombardo, Salvatore; Stathis, James H.; Linder, Barry P. Journal of Applied Physics, Vol. 98, Issue 12 https://doi.org/10.1063/1.2147714	journal	December 2005
Mobility Enhancement in Solution-Processed Transparent Conductive Oxide TFTs due to Electron Donation from Traps in High- k Gate Dielectrics Zeumault, Andre; Subramanian, Vivek Advanced Functional Materials, Vol. 26, Issue 6 https://doi.org/10.1002/adfm.201503940	journal	January 2016
Comprehensive Handbook of Chemical Bond Energies Luo, Yu-Ran https://doi.org/10.1201/9781420007282	book	March 2007
Metal Oxide Transistors via Polyethylenimine Doping of the Channel Layer: Interplay of Doping, Microstructure, and Charge Transport Huang, Wei; Zeng, Li; Yu, Xinge Advanced Functional Materials, Vol. 26, Issue 34 https://doi.org/10.1002/adfm.201602069	journal	June 2016
Surface-Modified High-k Oxide Gate Dielectrics for Low-Voltage High-Performance Pentacene Thin-Film Transistors Kim, C. S.; Jo, S. J.; Lee, S. W. Advanced Functional Materials, Vol. 17, Issue 6 https://doi.org/10.1002/adfm.200600747	journal	April 2007
Solution-Processed Flexible Fluorine-doped Indium Zinc Oxide Thin-Film Transistors Fabricated on Plastic Film at Low Temperature Seo, Jin-Suk; Jeon, Jun-Hyuck; Hwang, Young Hwan Scientific Reports, Vol. 3, Issue 1 https://doi.org/10.1038/srep02085	journal	June 2013
Solution-processable metal oxide semiconductors for thin-film transistor applications Thomas, Stuart R.; Pattanasattayavong, Pichaya; Anthopoulos, Thomas D. Chemical Society Reviews, Vol. 42, Issue 16 https://doi.org/10.1039/c3cs35402d	journal	January 2013
Organic thin-film transistors Klauk, Hagen Chemical Society Reviews, Vol. 39, Issue 7, p. 2643-2666 https://doi.org/10.1039/b909902f	journal	April 2010
Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set Kresse, G.; Furthmüller, J. Computational Materials Science, Vol. 6, Issue 1, p. 15-50 https://doi.org/10.1016/0927-0256(96)00008-0	journal	July 1996
Energy band gaps and lattice parameters evaluated with the Heyd-Scuseria-Ernzerhof screened hybrid functional Heyd, Jochen; Peralta, Juan E.; Scuseria, Gustavo E. The Journal of Chemical Physics, Vol. 123, Issue 17 https://doi.org/10.1063/1.2085170	journal	November 2005
Hybrid functionals based on a screened Coulomb potential Heyd, Jochen; Scuseria, Gustavo E.; Ernzerhof, Matthias The Journal of Chemical Physics, Vol. 118, Issue 18 https://doi.org/10.1063/1.1564060	journal	May 2003

Similar Records

Role of Fluoride Doping in Low-Temperature Combustion-Synthesized ZrO[subscript x] Dielectric Films

Journal Article · 2022 · ACS Appl. Mater. Interfaces · OSTI ID:1869891

Sil, Aritra; Goldfine, Elise A.; Huang, Wei; +4 more

Controlling the Phase Behavior of Low and Negative Thermal Expansion ReO[subscript 3]-Type Fluorides using Interstitial Anions: Sc[subscript 1-x]Zr[subscript x]F[subscript 3+x]

Journal Article · 2020 · Inorg. Chem. · OSTI ID:1869891

Baxter, Samuel J.; Loske, Katharina V.; Lloyd, II, Anthony J.; +1 more

Local structural distortion of BaZr[subscript x]Ti[subscript 1;#8722;x]O[subscript 3] nanocrystals synthesized at room temperature

Journal Article · 2012 · Chemical Communications · OSTI ID:1869891

Rabuffetti, Federico A; Brutchey, Richard L

Title: Role of Fluoride Doping in Low-Temperature Combustion-Synthesized ZrO[subscript x] Dielectric Films

Citation Formats

References (51)

Similar Records

Related Subjects