Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Printed hygroscopic electrodes for low-cost capacitive relative humidity sensors

Patent ·
OSTI ID:1859939
; ;

A capacitive relative humidity sensor includes a first electrode and a second electrode, where at least the one of the electrodes is a water-permeable electrode. The electrodes act in conjunction with a water-sensitive hygroscopic dielectric material. The design enables low-cost and simple fabrication of fast-responding and stable relative humidity sensors using digital fabrication techniques.

Research Organization:
Palo Alto Research Center Inc., Palo Alto, CA (United States)
Sponsoring Organization:
USDOE
Assignee:
Palo Alto Research Center Incorporated (Palo Alto, CA)
Patent Number(s):
11,143,615
Application Number:
16/176,067
OSTI ID:
1859939
Country of Publication:
United States
Language:
English

References (5)

High sensitivity capacitive humidity sensor with a novel polyimide design fabricated by MEMS technology conference January 2009
All additive inkjet printed humidity sensors on plastic substrate journal May 2012
Large-area compatible fabrication and encapsulation of inkjet-printed humidity sensors on flexible foils with integrated thermal compensation journal January 2013
A high-sensitivity polyimide capacitive relative humidity sensor for monitoring anodically bonded hermetic micropackages journal June 2001
Flexible polymer humidity sensor fabricated by inkjet printing conference June 2011

Similar Records

Related Subjects