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Methods and devices for fabricating and assembling printable semiconductor elements

Patent ·
OSTI ID:1840343
; ; ; ; ; ; ;

The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.

Research Organization:
Univ. of Illinois, Urbana-Champain, IL (United States)
Sponsoring Organization:
USDOE; Defense Advanced Research Projects Agency (DARPA)
DOE Contract Number:
FG02-91ER45439
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Number(s):
11,088,268
Application Number:
16/448,988
OSTI ID:
1840343
Country of Publication:
United States
Language:
English

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Electrically Induced Optical Emission from a Carbon Nanotube FET journal May 2003
Low-Temperature Deposition of Hydrogenated Amorphous Silicon in an Electron Cyclotron Resonance Reactor for Flexible Displays journal July 2005
Large-Area, Selective Transfer of Microstructured Silicon: A Printing- Based Approach to High-Performance Thin-Film Transistors Supported on Flexible Substrates journal October 2005
Patterning of dielectric oxide thin layers by microcontact printing of self-assembled monolayers journal December 1995
Semiconductor nanotube formation by a two-step template process journal October 1996
Thin-Film Transistors book February 2003
Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts journal February 2004
Thermally-stable low-resistance Ti/Al/Mo/Au multilayer ohmic contacts on n–GaN journal August 2002
Polarization Dependence of the Optical Absorption of Single-Walled Carbon Nanotubes journal March 2005
High-power laser diodes based on InGaAsP alloys journal June 1994
Interaction of fiber orientation and direction of impulse propagation with anatomic barriers in anisotropic canine myocardium. journal December 1988
Preparation of Macroporous Metal Films from Colloidal Crystals journal September 1999
The formation of controlled-porosity membranes from anodically oxidized aluminium journal January 1989
Nanoindentation testing of SU-8 photoresist mechanical properties journal May 2008
A New Etching Solution System, H3 PO4- H2O2- H2O, for GaAs and Its Kinetics journal January 1978
Template-Free Directional Growth of Single-Walled Carbon Nanotubes on a- and r-Plane Sapphire journal April 2005
Surface-induced structure formation of polymer blends on patterned substrates journal February 1998
High-performance organic thin-film transistors with metal oxide/metal bilayer electrode journal November 2005
Mesoscopic self‐assembly of gold islands on diblock‐copolymer films journal January 1994
Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing journal August 2004
Cathodoluminescence Properties of Undoped and Zn-Doped AlxGa1-xN Grown by Metalorganic Vapor Phase Epitaxy journal August 1991
The Characteristic Improvement of Si(111) Metal–Oxide–Semiconductor Field-Effect Transistor by Long-Time Hydrogen Annealing journal October 2004
Directed Assembly of One-Dimensional Nanostructures into Functional Networks journal January 2001
Structures of indium oxide nanobelts journal October 2003
High-mobility ultrathin semiconducting films prepared by spin coating journal March 2004
Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination journal July 2002
Impedance spectroscopy on stretchable microelectrode arrays journal July 2010
Spatial spectral analysis of human electrocorticograms including the alpha and gamma bands journal February 2000
Ordered Mesoporous Polymers of Tunable Pore Size from Colloidal Silica Templates journal February 1999
Large Area Submicrometer Contact Printing Using a Contact Aligner journal June 2000
Bioactive Silk Protein Biomaterial Systems for Optical Devices journal April 2008
Lateral growth of aligned mutilwalled carbon nanotubes under electric field journal May 2003
Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter journal May 1997
Surface Modification of Sylgard-184 Poly(dimethyl siloxane) Networks by Ultraviolet and Ultraviolet/Ozone Treatment journal October 2002
Silicon nanowire devices journal April 2000
Transparent flexible organic thin-film transistors that use printed single-walled carbon nanotube electrodes journal March 2006
Shape control of CdSe nanocrystals journal March 2000
III–V micromachined devices for microsystems journal September 1998
Finite deformation mechanics in buckled thin films on compliant supports journal September 2007
Supercritical Fluid–Liquid–Solid Synthesis of Gallium Arsenide Nanowires Seeded by Alkanethiol-Stabilized Gold Nanocrystals journal April 2004
Protective diamond-like carbon coatings for future optical storage disks journal March 2005
Microassembly of semiconductor three-dimensional photonic crystals journal January 2003
Ultrahigh-Density Nanowire Lattices and Circuits journal March 2003
Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks journal April 2001
Nanowire Arrays Defined by Nanoimprint Lithography journal April 2004
Chemical Etching Characteristics of (001)GaAs journal January 1983
Degradation mechanism of diethylene glycol units in a terephthalate polymer journal April 2006
Electro-optical response of a single-crystal diamond ultraviolet photoconductor in transverse configuration journal May 2005
Stretchable, Porous, and Conductive Energy Textiles journal February 2010
High Weight Fraction Surfactant Solubilization of Single-Wall Carbon Nanotubes in Water journal February 2003
Adhesion at the Solid-Elastomer Interface: Influence of the Interfacial Chains journal October 1995
Growth of Millimeter-Long and Horizontally Aligned Single-Walled Carbon Nanotubes on Flat Substrates journal May 2003
Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers journal October 1998
Synthetic Chemistry for Ultrapure, Processable, and High-Mobility Organic Transistor Semiconductors journal March 2001
Generating ∼90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask
  • Rogers, John A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 59-68 https://doi.org/10.1116/1.589836
journal June 1998
Fabrication of submicrometer features on curved substrates by microcontact printing journal August 1995
Structural and Mechanical Properties of Woven Fabrics Employing Peirce's Model journal October 2003
Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films journal September 2004
Stretchable wavy metal interconnects
  • Jones, Joyelle; Lacour, Stephanie P.; Wagner, Sigurd
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 22, Issue 4, p. 1723-1725 https://doi.org/10.1116/1.1756879
journal July 2004
Effects of Mechanical Strain on TFTs on Spherical Domes journal March 2004
Patterning Spherical Surfaces at the Two-Hundred-Nanometer Scale Using Soft Lithography journal April 2003
Tailored Micropatterns through Weak Polyelectrolyte Stamping journal March 2003
Aligned Arrays of Single-Walled Carbon Nanotubes Generated from Random Networks by Orientationally Selective Laser Ablation journal December 2004
Shape Selective Growth of CdS One-Dimensional Nanostructures by a Thermal Evaporation Process journal March 2006
Complementary carbon nanotube-gated carbon nanotube thin-film transistor journal February 2006
High-Resolution Contact Printing with Dendrimers journal April 2002
Soft lithographic fabrication of an image sensor array on a curved substrate
  • Jin, Hyun-Chul; Abelson, John R.; Erhardt, Martin K.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue 5, p. 2548-2551 https://doi.org/10.1116/1.1795249
journal October 2004
Organic electronics on paper journal April 2004
Electronic paper: Flexible active-matrix electronic ink display journal May 2003
Chemical Etching of InGaAsP/InP DH Wafer journal January 1982
Patterning Self-Assembled Monolayers: Applications in Materials Science journal May 1994
Hall Effect in the Accumulation Layers on the Surface of Organic Semiconductors journal November 2005
Electronics using hybrid-molecular and mono-molecular devices journal November 2000
A flexible and wearable glucose sensor based on functional polymers with Soft-MEMS techniques journal October 2006
Fabrication of Ordered Diamond/metal Nanocomposite Structures journal October 2000
Closure and Repropagation of Healed Cracks in Silicate Glass journal November 1985
Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species journal August 2001
Silk-based biomaterials journal February 2003
Microheater-integrated single gas sensor array chip fabricated on flexible polyimide substrate journal March 2006
Amorphous silicon detector and thin film transistor technology for large-area imaging of X-rays journal December 2000
Synthesis of branched 'nanotrees' by controlled seeding of multiple branching events journal May 2004
High Carrier Mobility in Single-Crystal Plasma-Deposited Diamond journal September 2002
Nanomaterial transfer using hot embossing for flexible electronic devices journal February 2006
Conducting elastomer surface texturing: a path to electrode spotting journal September 2004
The Adhesion Between Polymers journal August 1991
High-Performance Carbon Nanotube Field-Effect Transistor With Tunable Polarities journal September 2005
Silicon motherboards for multichannel optical modules
  • Ambrosy, A.; Richter, H.; Hehmann, J.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A, Vol. 19, Issue 1, p. 34-40 https://doi.org/10.1109/95.486559
journal March 1996
Fabrication of a Cylindrical Display by Patterned Assembly journal April 2002
Printed Multilayer Superstructures of Aligned Single-Walled Carbon Nanotubes for Electronic Applications journal November 2007
Polymer-on-Polymer Stamping: Universal Approaches to Chemically Patterned Surfaces journal April 2002
Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane) journal October 1998
Current–Voltage Characteristics of Long-Channel Nanobundle Thin-Film Transistors: A “Bottom-Up” Perspective journal February 2007
Multiwalled carbon nanotube AFM probes for surface characterization of micro/nanostructures journal November 2004
Some properties of spherical and rod-shaped semiconductor and metal nanocrystals journal January 2002
Electrical Contacts to Molecular Layers by Nanotransfer Printing journal July 2003
Mixed Mode Cracking in Layered Materials book January 1991
Printed plastic electronics and paperlike displays journal August 2002
Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon journal January 2008
Ultrathin Silicon Circuits With Strain-Isolation Layers and Mesh Layouts for High-Performance Electronics on Fabric, Vinyl, Leather, and Paper journal September 2009
The path to ubiquitous and low-cost organic electronic appliances on plastic journal April 2004
Percolation in Transparent and Conducting Carbon Nanotube Networks journal December 2004
Weave Patterned Organic Transistors on Fiber for E-Textiles journal February 2005
A hemispherical electronic eye camera based on compressible silicon optoelectronics journal August 2008
InGaN nanorings and nanodots by selective area epitaxy journal October 2005
Elastically relaxed free-standing strained-silicon nanomembranes journal April 2006
Shaped Films of Ionotropic Hydrogels Fabricated Using Templates of Patterned Paper journal January 2009
New Realization Method for Three-Dimensional Photonic Crystal in Optical Wavelength Region journal July 1996
EHRA/HRS Expert Consensus on Catheter Ablation of Ventricular Arrhythmias: Developed in a partnership with the European Heart Rhythm Association (EHRA), a Registered Branch of the European Society of Cardiology (ESC), and the Heart Rhythm Society (HRS); in collaboration with the American College of Cardiology (ACC) and the American Heart Association (AHA) journal May 2009
Water-insoluble silk films with silk I structure journal April 2010
Selecting the signals for a brain–machine interface journal December 2004
Tetherless thermobiochemically actuated microgrippers journal January 2009
X-ray holography for VLSI using synthetic bilevel holograms conference August 1997
Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates journal October 2005
Colloidal nanocrystal heterostructures with linear and branched topology journal July 2004
High Performance n-Type Carbon Nanotube Field-Effect Transistors with Chemically Doped Contacts journal February 2005
Chemistry and Physics in One Dimension: Synthesis and Properties of Nanowires and Nanotubes journal February 1999
High-frequency ultrasound array element using thermoelastic expansion in an elastomeric film journal July 2001
Flexible a-Si:H Position-Sensitive Detectors journal July 2005
Nanotechnology: High-speed integrated nanowire circuits journal April 2005
Interfacial Chemistries for Nanoscale Transfer Printing journal July 2002
Guided Growth of Large-Scale, Horizontally Aligned Arrays of Single-Walled Carbon Nanotubes and Their Use in Thin-Film Transistors journal August 2005

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