Atomic layer deposition of TiO[subscript 2], ZrO[subscript 2] and TiO[subscript 2]/ZrO[subscript 2]

Shahmohammadi, Mina; Nagay, Bruna E.; Bar?o, Valentim A.R.; Sukotjo, Cortino; Jursich, Gregory; Takoudis, Christos G.

doi:10.1016/j.apsusc.2021.151891

Title: Atomic layer deposition of TiO[subscript 2], ZrO[subscript 2] and TiO[subscript 2]/ZrO[subscript 2]

Journal Article · 01 March 2022 · Appl. Surf. Sci.

DOI:https://doi.org/10.1016/j.apsusc.2021.151891· OSTI ID:1834888

Shahmohammadi, Mina; Nagay, Bruna E.; Bar?o, Valentim A.R.; Sukotjo, Cortino; Jursich, Gregory; Takoudis, Christos G.

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Research Organization:: Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)

Sponsoring Organization:: DOE - Office Of Science; FOREIGN

OSTI ID:: 1834888

Journal Information:: Appl. Surf. Sci., Vol. 578

Country of Publication:: United States

Language:: ENGLISH

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