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Title: High temperature substrate heater for use in high and ultra-high vacuum systems

Abstract

A braze-free substrate heating device including a heater block body, a heater block lid, and a heating element. The heating element sits inside the heater block body. The heater block lid is on the heating element, such that the heating element is sandwiched between the heater block lid and the floor of the heater block body. The heating element is held in place by compressing the heater block lid into the heater block body and attaching the heater block lid to the top of the heater block body so that the heating element is fully supported over its surface area, and can maintain uniform thermal contact with the heater block lid and heater block body over its entire surface area.

Inventors:
;
Publication Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1805620
Patent Number(s):
10,945,311
Application Number:
15/801,261
Assignee:
Triad National Security, LLC (Los Alamos, NM)
DOE Contract Number:  
AC52-06NA25396
Resource Type:
Patent
Resource Relation:
Patent File Date: 11/01/2017
Country of Publication:
United States
Language:
English

Citation Formats

Dowden, Paul, and Jia, Quanxi. High temperature substrate heater for use in high and ultra-high vacuum systems. United States: N. p., 2021. Web.
Dowden, Paul, & Jia, Quanxi. High temperature substrate heater for use in high and ultra-high vacuum systems. United States.
Dowden, Paul, and Jia, Quanxi. 2021. "High temperature substrate heater for use in high and ultra-high vacuum systems". United States. https://www.osti.gov/servlets/purl/1805620.
@article{osti_1805620,
title = {High temperature substrate heater for use in high and ultra-high vacuum systems},
author = {Dowden, Paul and Jia, Quanxi},
abstractNote = {A braze-free substrate heating device including a heater block body, a heater block lid, and a heating element. The heating element sits inside the heater block body. The heater block lid is on the heating element, such that the heating element is sandwiched between the heater block lid and the floor of the heater block body. The heating element is held in place by compressing the heater block lid into the heater block body and attaching the heater block lid to the top of the heater block body so that the heating element is fully supported over its surface area, and can maintain uniform thermal contact with the heater block lid and heater block body over its entire surface area.},
doi = {},
url = {https://www.osti.gov/biblio/1805620}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2021},
month = {3}
}

Works referenced in this record:

Quartz substrate heater
patent, March 2000