Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Ferroelectric Phase Content in 7 nm Hf (1- x ) Zr x O 2 Thin Films Determined by X-Ray-Based Methods

Journal Article · · Physica Status Solidi. A, Applied Research
; ; ; ; ; ; ; ; ; ; ; ;

Research Organization:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Organization:
~OTHER
DOE Contract Number:
SC0012704
OSTI ID:
1783970
Report Number(s):
BNL-221501-2021-JACI
Journal Information:
Physica Status Solidi. A, Applied Research, Vol. 218, Issue 10
Publisher:
Wiley-Blackwell
Country of Publication:
United States
Language:
English

References (44)

Ferroelectricity in hafnium oxide thin films journal September 2011
Ferroelectric Zr 0.5 Hf 0.5 O 2 thin films for nonvolatile memory applications journal September 2011
Ferroelectricity in Simple Binary ZrO 2 and HfO 2 journal July 2012
Ferroelectric hafnium oxide for ferroelectric random-access memories and ferroelectric field-effect transistors journal May 2018
Ferroelectric Tunneling Junctions Based on Aluminum Oxide/ Zirconium-Doped Hafnium Oxide for Neuromorphic Computing journal December 2019
Scale-up and optimization of HfO2-ZrO2 solid solution thin films for the electrostatic supercapacitors journal September 2017
Toward a multifunctional monolithic device based on pyroelectricity and the electrocaloric effect of thin antiferroelectric Hf x Zr 1−x O 2 films journal March 2015
Pyroelectric response in crystalline hafnium zirconium oxide (Hf 1- x Zr x O 2 ) thin films journal February 2017
Kinetic pathway of the ferroelectric phase formation in doped HfO 2 films journal September 2017
Surface and grain boundary energy as the key enabler of ferroelectricity in nanoscale hafnia-zirconia: a comparison of model and experiment journal January 2017
Evolution of phases and ferroelectric properties of thin Hf 0.5 Zr 0.5 O 2 films according to the thickness and annealing temperature journal June 2013
Phase-Exchange-Driven Wake-Up and Fatigue in Ferroelectric Hafnium Zirconium Oxide Films journal May 2020
The effects of crystallographic orientation and strain of thin Hf 0.5 Zr 0.5 O 2 film on its ferroelectricity journal February 2014
Recent progress for obtaining the ferroelectric phase in hafnium oxide based films: impact of oxygen and zirconium journal October 2019
Improvement in ferroelectricity of Hf x Zr 1−x O 2 thin films using top- and bottom-ZrO 2 nucleation layers journal June 2019
Thermodynamic control of ferroelectric-phase formation in Hf x Zr 1− x O 2 and ZrO 2 journal November 2018
Thermodynamic and Kinetic Origins of Ferroelectricity in Fluorite Structure Oxides journal December 2018
Stabilizing the ferroelectric phase in doped hafnium oxide journal August 2015
Wake-Up in a Hf 0.5 Zr 0.5 O 2 Film: A Cycle-by-Cycle Emergence of the Remnant Polarization via the Domain Depinning and the Vanishing of the Anomalous Polarization Switching journal February 2019
Structural Correlation of Ferroelectric Behavior in Mixed Hafnia-Zirconia High-k Dielectrics for FeRAM and NCFET Applications journal January 2019
Hafnia and hafnia-toughened ceramics journal January 1992
Crystal Structure of Orthorhombic Zirconia in Partially Stabilized Zirconia journal September 1989
Investigating Alternative Gate Dielectrics: A Theoretical Approach journal July 2001
JCPDS-ICDD Research Associateship (cooperative program with NBS/NIST) journal November 2001
VESTA 3 for three-dimensional visualization of crystal, volumetric and morphology data journal October 2011
A comprehensive study on the structural evolution of HfO 2 thin films doped with various dopants journal January 2017
Highly Mixed Phases in Ball-milled Cu/ZnO Catalysts:  An EXAFS and XANES Study journal August 2006
The crystal fraction determination of the nanocrystalline phase transformed from the Fe-base amorphous matrix using EXAFS journal April 2004
Crystal Structures of the Tetragonal Ceria−Zirconia Solid Solutions Ce x Zr 1− x O 2 through First Principles Calculations (0 ≤ x ≤ 1) journal June 2009
Short-Range Order in Amorphous and Crystalline Ferroelectric Hf0.5Zr0.5O2 journal June 2018
Local structural investigation of hafnia-zirconia polymorphs in powders and thin films by X-ray absorption spectroscopy journal November 2019
Crystal Phase Distribution and Ferroelectricity in Ultrathin HfO 2 –ZrO 2 Bilayers journal September 2019
Quantifying non-centrosymmetric orthorhombic phase fraction in 10 nm ferroelectric Hf 0.5 Zr 0.5 O 2 films journal December 2020
A Comprehensive Study on the Effect of TiN Top and Bottom Electrodes on Atomic Layer Deposited Ferroelectric Hf0.5Zr0.5O2 Thin Films journal July 2020
The origin of ferroelectricity in Hf 1−x Zr x O 2 : A computational investigation and a surface energy model journal April 2015
On the structural origins of ferroelectricity in HfO 2 thin films journal April 2015
Prediction of new metastable $$\hbox {HfO}_{2}$$ HfO 2 phases: toward understanding ferro- and antiferroelectric films journal November 2017
A rhombohedral ferroelectric phase in epitaxially strained Hf0.5Zr0.5O2 thin films journal October 2018
Multifidelity Information Fusion with Machine Learning: A Case Study of Dopant Formation Energies in Hafnia journal April 2019
Hf x Zr 1−x O 2 compositional control using co-injection atomic layer deposition
  • Consiglio, Steven; Tapily, Kandabara; Clark, Robert D.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 31, Issue 1 https://doi.org/10.1116/1.4764473
journal January 2013
International Union of Crystallography. Commission on Powder Diffraction. Rietveld refinement round robin. II. Analysis of monoclinic ZrO 2 journal October 1994
ATHENA , ARTEMIS , HEPHAESTUS : data analysis for X-ray absorption spectroscopy using IFEFFIT journal June 2005
Theoretical approaches to x-ray absorption fine structure journal July 2000
Iron Vacancies Accommodate Uranyl Incorporation into Hematite journal May 2018

Similar Records

Related Subjects

99 GENERAL AND MISCELLANEOUS