Implantation and deposition of adherent metal-oxide ceramic coatings
- Los Alamos National Lab., NM (United States)
Firing a cathodic-arc at a pulse biased target in a low pressure background of oxygen allows very adherent coatings of metal-oxide ceramics to be deposited. Due to the high density of the metal-ion plasma and the high voltage of the pulse bias (50 kV), a relatively conformal implant can be achieved. This implanted metal layer stitches the metal-oxide coating to the surface and provides a graded interface which resists delamination. The authors present characterization of the metal-ion and carbon plasmas created by a cathodic-arc, discuss the effect of varying the relative phase of the cathodic-arc and target bias pulses, examine the conformality of ceramic and diamond-like-carbon films deposited on complicated shapes, and provide evidence of increased adherence due to the implantation step.
- OSTI ID:
- 178289
- Report Number(s):
- CONF-950612-; ISBN 0-7803-2669-5; TRN: IM9607%%319
- Resource Relation:
- Conference: 22. international conference on plasma science, Madison, WI (United States), 5-8 Jun 1995; Other Information: PBD: 1995; Related Information: Is Part Of IEEE conference record -- abstracts: 1995 IEEE international conference on plasma science; PB: 312 p.
- Country of Publication:
- United States
- Language:
- English
Similar Records
Plasma source ion implantation research and applications at Los Alamos National Laboratory
Diamond-like carbon produced by plasma source ion implantation as a corrosion barrier