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Enhanced electron amplifier structure and method of fabricating the enhanced electron amplifier structure

Patent ·
OSTI ID:1771736
;

An enhanced electron amplifier structure includes a microporous substrate having a front surface and a rear surface, the microporous substrate including at least one channel extending substantially through the substrate between the front surface and the rear surface, an ion diffusion layer formed on a surface of the channel, the ion diffusion layer comprising a metal oxide, a resistive coating layer formed on the first ion diffusion layer, an emissive coating layer formed on the resistive coating layer, and an optional ion feedback layer formed on the front surface of the structure. The emissive coating produces a secondary electron emission responsive to an interaction with a particle received by the channel. The ion diffusion layer, the resistive coating layer, the emissive coating layer, and the ion feedback layer are independently deposited via chemical vapor deposition or atomic layer deposition.

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-06CH11357
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Number(s):
10,867,768
Application Number:
15/691,633
OSTI ID:
1771736
Country of Publication:
United States
Language:
English

References (6)

The Tynode: A new vacuum electron multiplier
  • van der Graaf, Harry; Akhtar, Hassan; Budko, Neil
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 847 https://doi.org/10.1016/j.nima.2016.11.064
journal March 2017
Effects of ion barrier film on image noise in generation III image tube conference August 2012
Effect of thermal annealing and chemical treatments on secondary electron emission properties of atomic layer deposited MgO journal November 2018
Electron transmittance characteristics of MCP ion barrier film conference January 2005
A neutron detector based on microchannel plates report May 1987
The Research on Preparation Process Optimization of Ion Barrier Film on the Input Side of MCP journal May 2013

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