Quantifying non-centrosymmetric orthorhombic phase fraction in 10 nm ferroelectric Hf0.5Zr0.5O2 films

Mukundan, V; Consiglio, S.; Triyoso, D.; Tapily, K.; Schujman, S.; Mart, C.; Kämpfe, T.; Weinreich, W.; Jordan-Sweet, J.; Clark, R.; Leusink, G.; Diebold, A.

doi:10.1063/5.0029611

Quantifying non-centrosymmetric orthorhombic phase fraction in 10 nm ferroelectric Hf0.5Zr0.5O2 films

Journal Article · 01 January 2022 · Applied Physics Letters

DOI:https://doi.org/10.1063/5.0029611· OSTI ID:1760527

Mukundan, V; Consiglio, S.; Triyoso, D.; Tapily, K.; Schujman, S.; Mart, C.; Kämpfe, T.; Weinreich, W.; Jordan-Sweet, J.; Clark, R.; Leusink, G.; Diebold, A.

Research Organization:: Brookhaven National Lab. (BNL), Upton, NY (United States)

Sponsoring Organization:: ~OTHER

DOE Contract Number:: SC0012704

OSTI ID:: 1760527

Report Number(s):: BNL-220875-2021-JACI

Journal Information:: Applied Physics Letters, Vol. 117, Issue 26

Publisher:: American Institute of Physics (AIP)

Country of Publication:: United States

Language:: English

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