skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Commercially Fabricated Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Next-Generation Cosmic Microwave Background Polarimetry Experiment

Abstract

We report on the development of commercially fabricated multi-chronic antenna-coupled transition edge sensor (TES) bolometer arrays for cosmic microwave background (CMB) polarimetry experiments. The orders of magnitude increase in detector count for next-generation CMB experiments require a new approach in detector wafer production to increase fabrication throughput. Here, we describe collaborative efforts with a commercial superconductor electronics fabrication facility (SeeQC, Inc.) to fabricate antenna-coupled TES bolometer detectors. We have successfully fabricated an operational dual-polarization, dichroic sinuous antenna-coupled TES detector array on a 150-mm-diameter wafer. The fabricated detector arrays have average yield of 95% and excellent uniformity across the wafer. Both RF characteristics and TES bolometer properties are suitable for CMB observations. We successfully fabricated different types of TES bolometers optimized for frequency multiplexing readout, time-domain multiplexing readout, and microwave SQUID multiplexing readout. We also demonstrated high production throughput. We discuss the motivation, design considerations, fabrication processes, test results, and how industrial detector fabrication could be a path to fabricate hundreds of detector wafers for future CMB polarimetry experiments.

Authors:
ORCiD logo [1];  [2];  [3];  [2];  [4];  [5];  [6];  [2];  [5];  [2];  [5];  [4];  [5]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
  2. Cornell Univ., Ithaca, NY (United States)
  3. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Univ. of California, Berkeley, CA (United States)
  4. Univ. of California, Berkeley, CA (United States). Radio Astronomy Lab.
  5. SeeQC, Inc., Elmsford, NY (United States)
  6. Univ. of California, Berkeley, CA (United States)
Publication Date:
Research Org.:
SeeQC, Inc., Elmsford, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), High Energy Physics (HEP)
OSTI Identifier:
1742085
Grant/Contract Number:  
SC0017818
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Journal of Low Temperature Physics
Additional Journal Information:
Journal Volume: 199; Journal Issue: 3-4; Journal ID: ISSN 0022-2291
Publisher:
Springer
Country of Publication:
United States
Language:
English
Subject:
79 ASTRONOMY AND ASTROPHYSICS; 47 OTHER INSTRUMENTATION; Transition edge sensors; Bolometers; Cosmic Microwave Background; TES bolometer; Fabrication; Technology Transfer

Citation Formats

Suzuki, Aritoki, Cothard, Nicholas, Lee, Adrian T., Niemack, Michael D., Raum, Christopher, Renzullo, Mario, Sasse, Trevor, Stevens, Jason, Truitt, Patrick, Vavagiakis, Eve, Vivalda, John, Westrook, Benjamin, and Yohannes, Daniel. Commercially Fabricated Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Next-Generation Cosmic Microwave Background Polarimetry Experiment. United States: N. p., 2020. Web. doi:10.1007/s10909-019-02325-0.
Suzuki, Aritoki, Cothard, Nicholas, Lee, Adrian T., Niemack, Michael D., Raum, Christopher, Renzullo, Mario, Sasse, Trevor, Stevens, Jason, Truitt, Patrick, Vavagiakis, Eve, Vivalda, John, Westrook, Benjamin, & Yohannes, Daniel. Commercially Fabricated Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Next-Generation Cosmic Microwave Background Polarimetry Experiment. United States. https://doi.org/10.1007/s10909-019-02325-0
Suzuki, Aritoki, Cothard, Nicholas, Lee, Adrian T., Niemack, Michael D., Raum, Christopher, Renzullo, Mario, Sasse, Trevor, Stevens, Jason, Truitt, Patrick, Vavagiakis, Eve, Vivalda, John, Westrook, Benjamin, and Yohannes, Daniel. 2020. "Commercially Fabricated Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Next-Generation Cosmic Microwave Background Polarimetry Experiment". United States. https://doi.org/10.1007/s10909-019-02325-0. https://www.osti.gov/servlets/purl/1742085.
@article{osti_1742085,
title = {Commercially Fabricated Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Next-Generation Cosmic Microwave Background Polarimetry Experiment},
author = {Suzuki, Aritoki and Cothard, Nicholas and Lee, Adrian T. and Niemack, Michael D. and Raum, Christopher and Renzullo, Mario and Sasse, Trevor and Stevens, Jason and Truitt, Patrick and Vavagiakis, Eve and Vivalda, John and Westrook, Benjamin and Yohannes, Daniel},
abstractNote = {We report on the development of commercially fabricated multi-chronic antenna-coupled transition edge sensor (TES) bolometer arrays for cosmic microwave background (CMB) polarimetry experiments. The orders of magnitude increase in detector count for next-generation CMB experiments require a new approach in detector wafer production to increase fabrication throughput. Here, we describe collaborative efforts with a commercial superconductor electronics fabrication facility (SeeQC, Inc.) to fabricate antenna-coupled TES bolometer detectors. We have successfully fabricated an operational dual-polarization, dichroic sinuous antenna-coupled TES detector array on a 150-mm-diameter wafer. The fabricated detector arrays have average yield of 95% and excellent uniformity across the wafer. Both RF characteristics and TES bolometer properties are suitable for CMB observations. We successfully fabricated different types of TES bolometers optimized for frequency multiplexing readout, time-domain multiplexing readout, and microwave SQUID multiplexing readout. We also demonstrated high production throughput. We discuss the motivation, design considerations, fabrication processes, test results, and how industrial detector fabrication could be a path to fabricate hundreds of detector wafers for future CMB polarimetry experiments.},
doi = {10.1007/s10909-019-02325-0},
url = {https://www.osti.gov/biblio/1742085}, journal = {Journal of Low Temperature Physics},
issn = {0022-2291},
number = 3-4,
volume = 199,
place = {United States},
year = {2020},
month = {1}
}

Works referenced in this record:

Optimization study for the experimental configuration of CMB-S4
journal, February 2018


Commercialization of Micro-fabrication of Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Studies of the Cosmic Microwave Background
journal, April 2018


AlMn Transition Edge Sensors for Advanced ACTPol
journal, February 2016


The POLARBEAR-2 and Simons Array Focal Plane Fabrication Status
journal, September 2018


Works referencing / citing this record:

Updated Design of the CMB Polarization Experiment Satellite LiteBIRD
journal, January 2020


Updated Design of the CMB Polarization Experiment Satellite LiteBIRD
text, January 2020


Updated Design of the CMB Polarization Experiment Satellite LiteBIRD
text, January 2020