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Title: Development of the Ultra-Low Loss SuperconductingResonators Integrated with Detectors for Frequency-Domain Multiplexing Readout of Future Cosmic Microwave Background Experiments (Final Report)

Abstract

In 2015, the Cosmic Microwave Background (CMB) community started planning CMB Stage IV (CMBS4), which aims to make definitive measurements of the early universe with ~500,000 detectors. To reach this number of detectors, the CMB-S4 Concept Definition Task Force found that “Investment is needed in proving process uniformity and reproducibility in TES polarimeter fabrication. In addition, cost reduction could potentially be achieved…by exploring commercial fabrication options.” As part of this effort, Dr. Aritoki Suzuki of Lawrence Berkeley National Laboratory (LBNL) began working with Seeqc, Inc. (formerly a division of HYPRES, Inc.) on fabrication of antenna coupled transition edge sensor (TES) bolometers at Seeqc’s commercial Niobium foundry. Phase I was a study in integrating low loss superconducting resonators on the same wafer as the bolometer arrays for frequency domain multiplexing (FDM). In Phase II, we made several achievements advancing Seeqc’s ability to fabricate high quality TES detector wafers. First, we transitioned the remaining fabrication steps from LBNL to Seeqc and demonstrated complete end-to-end commercial fabrication of TES detector wafers. Second, we demonstrated an ability to optimize fabrication steps, including developing a low loss/low stress SiN film that balances the need for high optical efficiency with the need for low film stress.more » Finally, we showed that integrated LC resonators, redesigned for higher frequencies, can be used to measure the RF loss tangent in the detector wafer’s SiN dielectric, which can be used for process monitoring during high throughput detector fabrication runs. As a result of our Phase II efforts, we are able to manufacture antenna coupled TES bolometer arrays that meet CMB experiment requirements in terms of T_C, detector efficiency, and saturation power. And we have demonstrated able to fabricate detectors that can couple to all three leading readout methods (frequency domain multiplexing (FDM), time domain multiplexing (TDM) and microwave SQUID multiplexing (μmux).« less

Authors:
Publication Date:
Research Org.:
Seeqc, Inc., Elmsford, NY
Sponsoring Org.:
USDOE Office of Science (SC), High Energy Physics (HEP)
OSTI Identifier:
1742084
Report Number(s):
DOE-SEEQC-17818
DOE Contract Number:  
SC0017818
Type / Phase:
SBIR (Phase II)
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
79 ASTRONOMY AND ASTROPHYSICS; 47 OTHER INSTRUMENTATION; transition edge sensors, bolometers, cosmic microwave background

Citation Formats

Truitt, Patrick. Development of the Ultra-Low Loss SuperconductingResonators Integrated with Detectors for Frequency-Domain Multiplexing Readout of Future Cosmic Microwave Background Experiments (Final Report). United States: N. p., 2020. Web.
Truitt, Patrick. Development of the Ultra-Low Loss SuperconductingResonators Integrated with Detectors for Frequency-Domain Multiplexing Readout of Future Cosmic Microwave Background Experiments (Final Report). United States.
Truitt, Patrick. 2020. "Development of the Ultra-Low Loss SuperconductingResonators Integrated with Detectors for Frequency-Domain Multiplexing Readout of Future Cosmic Microwave Background Experiments (Final Report)". United States.
@article{osti_1742084,
title = {Development of the Ultra-Low Loss SuperconductingResonators Integrated with Detectors for Frequency-Domain Multiplexing Readout of Future Cosmic Microwave Background Experiments (Final Report)},
author = {Truitt, Patrick},
abstractNote = {In 2015, the Cosmic Microwave Background (CMB) community started planning CMB Stage IV (CMBS4), which aims to make definitive measurements of the early universe with ~500,000 detectors. To reach this number of detectors, the CMB-S4 Concept Definition Task Force found that “Investment is needed in proving process uniformity and reproducibility in TES polarimeter fabrication. In addition, cost reduction could potentially be achieved…by exploring commercial fabrication options.” As part of this effort, Dr. Aritoki Suzuki of Lawrence Berkeley National Laboratory (LBNL) began working with Seeqc, Inc. (formerly a division of HYPRES, Inc.) on fabrication of antenna coupled transition edge sensor (TES) bolometers at Seeqc’s commercial Niobium foundry. Phase I was a study in integrating low loss superconducting resonators on the same wafer as the bolometer arrays for frequency domain multiplexing (FDM). In Phase II, we made several achievements advancing Seeqc’s ability to fabricate high quality TES detector wafers. First, we transitioned the remaining fabrication steps from LBNL to Seeqc and demonstrated complete end-to-end commercial fabrication of TES detector wafers. Second, we demonstrated an ability to optimize fabrication steps, including developing a low loss/low stress SiN film that balances the need for high optical efficiency with the need for low film stress. Finally, we showed that integrated LC resonators, redesigned for higher frequencies, can be used to measure the RF loss tangent in the detector wafer’s SiN dielectric, which can be used for process monitoring during high throughput detector fabrication runs. As a result of our Phase II efforts, we are able to manufacture antenna coupled TES bolometer arrays that meet CMB experiment requirements in terms of T_C, detector efficiency, and saturation power. And we have demonstrated able to fabricate detectors that can couple to all three leading readout methods (frequency domain multiplexing (FDM), time domain multiplexing (TDM) and microwave SQUID multiplexing (μmux).},
doi = {},
url = {https://www.osti.gov/biblio/1742084}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {12}
}

Technical Report:
This technical report may be released as soon as September 7, 2022
Other availability
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