Structurally controlled deposition of silicon onto nanowires
Patent
·
OSTI ID:1735014
Provided herein are nanostructures for lithium ion battery electrodes and methods of fabrication. In some embodiments, a nanostructure template coated with a silicon coating is provided. The silicon coating may include a non-conformal, more porous layer and a conformal, denser layer on the non-conformal, more porous layer. In some embodiments, two different deposition processes, e.g., a PECVD layer to deposit the non-conformal layer and a thermal CVD process to deposit the conformal layer, are used. Anodes including the nanostructures have longer cycle lifetimes than anodes made using either a PECVD or thermal CVD method alone.
- Research Organization:
- Amprius, Inc., Fremont, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- EE0005474
- Assignee:
- Amprius, Inc. (Fremont, CA)
- Patent Number(s):
- 10,707,484
- Application Number:
- 15/887,809
- OSTI ID:
- 1735014
- Country of Publication:
- United States
- Language:
- English
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