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Title: Fabrication of multilayered carbon MEMS devices

Abstract

The various technologies presented herein relate to formation of carbon micromechanical systems (CMEMS), wherein the CMEMS comprise multiple layers of carbon structures and are formed using a plurality of photoresist precursors that are processed to form carbon. The various embodiments can be utilized in producing a plurality of CMEMS with full production level fabrication, e.g., 6 inch wafers can be processed. A pyrolyzed layer of carbon is lithographically defined after pyrolysis, wherein the post-pyrolysis etch process can produce carbon structures having repeatable and accurate device geometries, with straight sidewalls. A sacrificial layer can be applied to facilitate separation of a first carbon layer from a second carbon layer, wherein, upon pyrolysis to form the second carbon layer and lithography thereof, the sacrificial layer is removed to form a CMEMS comprising a first carbon layer (e.g., comprising bottom contacts) located beneath a second carbon layer (e.g., a mechanical layer).

Inventors:
; ; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1632600
Patent Number(s):
10,570,010
Application Number:
15/624,928
Assignee:
National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
DOE Contract Number:  
NA0003525
Resource Type:
Patent
Resource Relation:
Patent File Date: 06/16/2017
Country of Publication:
United States
Language:
English

Citation Formats

Finnegan, Patrick Sean, Washburn, Cody M., Burckel, David Bruce, Wheeler, David R., Lambert, Timothy N., Massey, Lee Taylor, Strong, Jennifer Marie, and Dyck, Christopher. Fabrication of multilayered carbon MEMS devices. United States: N. p., 2020. Web.
Finnegan, Patrick Sean, Washburn, Cody M., Burckel, David Bruce, Wheeler, David R., Lambert, Timothy N., Massey, Lee Taylor, Strong, Jennifer Marie, & Dyck, Christopher. Fabrication of multilayered carbon MEMS devices. United States.
Finnegan, Patrick Sean, Washburn, Cody M., Burckel, David Bruce, Wheeler, David R., Lambert, Timothy N., Massey, Lee Taylor, Strong, Jennifer Marie, and Dyck, Christopher. 2020. "Fabrication of multilayered carbon MEMS devices". United States. https://www.osti.gov/servlets/purl/1632600.
@article{osti_1632600,
title = {Fabrication of multilayered carbon MEMS devices},
author = {Finnegan, Patrick Sean and Washburn, Cody M. and Burckel, David Bruce and Wheeler, David R. and Lambert, Timothy N. and Massey, Lee Taylor and Strong, Jennifer Marie and Dyck, Christopher},
abstractNote = {The various technologies presented herein relate to formation of carbon micromechanical systems (CMEMS), wherein the CMEMS comprise multiple layers of carbon structures and are formed using a plurality of photoresist precursors that are processed to form carbon. The various embodiments can be utilized in producing a plurality of CMEMS with full production level fabrication, e.g., 6 inch wafers can be processed. A pyrolyzed layer of carbon is lithographically defined after pyrolysis, wherein the post-pyrolysis etch process can produce carbon structures having repeatable and accurate device geometries, with straight sidewalls. A sacrificial layer can be applied to facilitate separation of a first carbon layer from a second carbon layer, wherein, upon pyrolysis to form the second carbon layer and lithography thereof, the sacrificial layer is removed to form a CMEMS comprising a first carbon layer (e.g., comprising bottom contacts) located beneath a second carbon layer (e.g., a mechanical layer).},
doi = {},
url = {https://www.osti.gov/biblio/1632600}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {2}
}