2Dspatiotemporal structure of ICP reactor
Abstract
Practical application for material processing has given a renewed interest in the study of an inductively coupled plasma (ICP) reactor to perform large scale and high density plasma under low pressure condition. Here, the authors have developed a twodimensional model considering radial and axial directions and discussed the spatiotemporal structure. The ICP reactor used in this study is a cylindrical tube in a diameter of 10 cm with three induction coils, tightly wound around the side wall. Each coil can be driven at 13.56 MHz independently. The RCT model, developed in this study, consists of the continuity equation of charged particles, Maxwell`s equation and the relaxation equation of electron energy greater than {epsilon}{sub i}. As for magnetic field, the induced field by external current coils is only considered. The electric field is the sum of a space charge and induced fields. The system of the governing equations is numerically solved in a cylindrical coordinate. Typical 2Dspatiotemporal discharge structure of ICP in a collision dominated region has been obtained in Ar gas. Comparing the results with those in the previous 1Dmodeling, the effect of the shape of external coils is investigated. The influence of the amplitude of each of three currentmore »
 Authors:

 Keio Univ., Hiyoshi, Yokohama (Japan). Dept. of Electrical Engineering
 Publication Date:
 OSTI Identifier:
 163126
 Report Number(s):
 CONF950612
ISBN 0780326695; TRN: IM9604%%230
 Resource Type:
 Conference
 Resource Relation:
 Conference: 22. international conference on plasma science, Madison, WI (United States), 58 Jun 1995; Other Information: PBD: 1995; Related Information: Is Part Of IEEE conference record  abstracts: 1995 IEEE international conference on plasma science; PB: 312 p.
 Country of Publication:
 United States
 Language:
 English
 Subject:
 36 MATERIALS SCIENCE; CHEMICAL REACTORS; PLASMA SIMULATION; MATERIALS; FABRICATION; PLASMA DENSITY; TWODIMENSIONAL CALCULATIONS; ARGON; COMPARATIVE EVALUATIONS
Citation Formats
Kamimura, K, Makabe, T, Nakano, N, and Nakagami, S. 2Dspatiotemporal structure of ICP reactor. United States: N. p., 1995.
Web.
Kamimura, K, Makabe, T, Nakano, N, & Nakagami, S. 2Dspatiotemporal structure of ICP reactor. United States.
Kamimura, K, Makabe, T, Nakano, N, and Nakagami, S. Sun .
"2Dspatiotemporal structure of ICP reactor". United States.
@article{osti_163126,
title = {2Dspatiotemporal structure of ICP reactor},
author = {Kamimura, K and Makabe, T and Nakano, N and Nakagami, S},
abstractNote = {Practical application for material processing has given a renewed interest in the study of an inductively coupled plasma (ICP) reactor to perform large scale and high density plasma under low pressure condition. Here, the authors have developed a twodimensional model considering radial and axial directions and discussed the spatiotemporal structure. The ICP reactor used in this study is a cylindrical tube in a diameter of 10 cm with three induction coils, tightly wound around the side wall. Each coil can be driven at 13.56 MHz independently. The RCT model, developed in this study, consists of the continuity equation of charged particles, Maxwell`s equation and the relaxation equation of electron energy greater than {epsilon}{sub i}. As for magnetic field, the induced field by external current coils is only considered. The electric field is the sum of a space charge and induced fields. The system of the governing equations is numerically solved in a cylindrical coordinate. Typical 2Dspatiotemporal discharge structure of ICP in a collision dominated region has been obtained in Ar gas. Comparing the results with those in the previous 1Dmodeling, the effect of the shape of external coils is investigated. The influence of the amplitude of each of three current drivers on the plasma structure is discussed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {12}
}