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Title: 2D-spatiotemporal structure of ICP reactor

Abstract

Practical application for material processing has given a renewed interest in the study of an inductively coupled plasma (ICP) reactor to perform large scale and high density plasma under low pressure condition. Here, the authors have developed a two-dimensional model considering radial and axial directions and discussed the spatio-temporal structure. The ICP reactor used in this study is a cylindrical tube in a diameter of 10 cm with three induction coils, tightly wound around the side wall. Each coil can be driven at 13.56 MHz independently. The RCT model, developed in this study, consists of the continuity equation of charged particles, Maxwell`s equation and the relaxation equation of electron energy greater than {epsilon}{sub i}. As for magnetic field, the induced field by external current coils is only considered. The electric field is the sum of a space charge and induced fields. The system of the governing equations is numerically solved in a cylindrical coordinate. Typical 2D-spatio-temporal discharge structure of ICP in a collision dominated region has been obtained in Ar gas. Comparing the results with those in the previous 1D-modeling, the effect of the shape of external coils is investigated. The influence of the amplitude of each of three currentmore » drivers on the plasma structure is discussed.« less

Authors:
; ; ;  [1]
  1. Keio Univ., Hiyoshi, Yokohama (Japan). Dept. of Electrical Engineering
Publication Date:
OSTI Identifier:
163126
Report Number(s):
CONF-950612-
ISBN 0-7803-2669-5; TRN: IM9604%%230
Resource Type:
Conference
Resource Relation:
Conference: 22. international conference on plasma science, Madison, WI (United States), 5-8 Jun 1995; Other Information: PBD: 1995; Related Information: Is Part Of IEEE conference record -- abstracts: 1995 IEEE international conference on plasma science; PB: 312 p.
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CHEMICAL REACTORS; PLASMA SIMULATION; MATERIALS; FABRICATION; PLASMA DENSITY; TWO-DIMENSIONAL CALCULATIONS; ARGON; COMPARATIVE EVALUATIONS

Citation Formats

Kamimura, K, Makabe, T, Nakano, N, and Nakagami, S. 2D-spatiotemporal structure of ICP reactor. United States: N. p., 1995. Web.
Kamimura, K, Makabe, T, Nakano, N, & Nakagami, S. 2D-spatiotemporal structure of ICP reactor. United States.
Kamimura, K, Makabe, T, Nakano, N, and Nakagami, S. Sun . "2D-spatiotemporal structure of ICP reactor". United States.
@article{osti_163126,
title = {2D-spatiotemporal structure of ICP reactor},
author = {Kamimura, K and Makabe, T and Nakano, N and Nakagami, S},
abstractNote = {Practical application for material processing has given a renewed interest in the study of an inductively coupled plasma (ICP) reactor to perform large scale and high density plasma under low pressure condition. Here, the authors have developed a two-dimensional model considering radial and axial directions and discussed the spatio-temporal structure. The ICP reactor used in this study is a cylindrical tube in a diameter of 10 cm with three induction coils, tightly wound around the side wall. Each coil can be driven at 13.56 MHz independently. The RCT model, developed in this study, consists of the continuity equation of charged particles, Maxwell`s equation and the relaxation equation of electron energy greater than {epsilon}{sub i}. As for magnetic field, the induced field by external current coils is only considered. The electric field is the sum of a space charge and induced fields. The system of the governing equations is numerically solved in a cylindrical coordinate. Typical 2D-spatio-temporal discharge structure of ICP in a collision dominated region has been obtained in Ar gas. Comparing the results with those in the previous 1D-modeling, the effect of the shape of external coils is investigated. The influence of the amplitude of each of three current drivers on the plasma structure is discussed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {12}
}

Conference:
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