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Title: Surface stoichiometry and interface formation during molecular-beam epitaxy of strained InAs/Al{sub x}Ga{sub 0.48-x}In{sub 0.52}As heterostructures

Journal Article · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
DOI:https://doi.org/10.1116/1.586946· OSTI ID:161708
; ;  [1]
  1. Max-Planck-Institut fuer Festkoerperforschung, Stuttgart (Germany)

We show that the surface stoichiometry of the film{emdash}i.e., cation- or anion-stable surface{emdash} provides a unique means to control the interface formation and sample quality during molecular-beam epitaxy of strained InAs films buried in an A1{sub x}Ga{sub 0.48-x}In{sub 0.52}As matrix lattice matched to InP substrates. When the highly (3.2%) strained InAs films are grown under As-stable conditions, islanding occurs which leads to defected interfaces. On the contrary, under In-stable conditions islanding of the InAs films is prevented and high quality strained interfaces are obtained. 14 refs., 6 figs.

OSTI ID:
161708
Report Number(s):
CONF-930115-; ISSN 0734-211X; TRN: 95:004881-0026
Journal Information:
Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Vol. 11, Issue 4; Conference: 20. physics and chemistry of semiconductor interfaces, Williamsburg, VA (United States), 25-29 Jan 1993; Other Information: PBD: Jul-Aug 1993
Country of Publication:
United States
Language:
English