Effects of ion irradiation on chemical and mechanical properties of magnetron sputtered amorphous SiOC

Journal Article · Wed May 01 00:00:00 EDT 2019 · Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

DOI:https://doi.org/10.1016/j.nimb.2019.03.009· OSTI ID:1613828

Zare, A.; Su, Q.; Gigax, J.; Shojaee, S. A.; Harriman, T. A.; Nastasi, M.; Shao, L.; Materer, N. F.; Lucca, D. A.

Not provided.

• Research Organization: Univ. of Nebraska, Lincoln, NE (United States)
• Sponsoring Organization: USDOE Office of Nuclear Energy (NE)
• DOE Contract Number: NE0000533
• OSTI ID: 1613828
• Journal Information: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 446, Issue C; ISSN 0168-583X
• Publisher: Elsevier
• Country of Publication: United States
• Language: English

Related Subjects

Instruments & Instrumentation
Nuclear Science & Technology
Physics