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Title: Observation of increased nanostructure cone growth on Cr due to grazing-incidence Ta seed atom deposition in a He plasma

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.5110298· OSTI ID:1609937

Nanostructure cone growth on chromium during helium plasma exposure in the PISCES-A linear plasma device is found to increase with the deposition of heavy tantalum atoms. Tantalum is found to be especially effective at increasing cone growth if the tantalum is incident on the surface at a grazing angle (~5° or less). Tantalum atoms at grazing incidence are observed to be dominantly deposited at the cone tips, consistent with reduced sputtering of the cone tips and increased cone growth. Monte-Carlo simulations are found to be qualitatively consistent with the experimental observation that grazing-incidence heavy atom deposition on a lighter substrate will tend to increase cone growth.

Research Organization:
Univ. of California, San Diego, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
Grant/Contract Number:
FG02-07ER54912
OSTI ID:
1609937
Journal Information:
Journal of Applied Physics, Vol. 126, Issue 7; ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 1 work
Citation information provided by
Web of Science

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