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Title: Using resonant soft x-ray scattering to image patterns on undeveloped resists

Abstract

Copyright © 2018 SPIE. Extreme ultraviolet lithography is one of the most promising printing techniques for high volume semiconductor manufacturing at the 14 nm half-pitch device node and beyond. However, key challenges around EUV photoresist materials such as the exposure-dose sensitivity or the line-width roughness continue to impede the full adoption into industrial nanofab facilities. New metrology tools are required to address these challenges by helping to determine the impact of the EUV materials' properties and processing conditions on the roughness through the different step of the process. Here, we apply the resonant soft x-ray scattering (RSOXS) technique to gain insights into the structure of patterned EUV resists before the development step takes place. By using energies around the carbon absorption edge to take advantage of small differences in chemistry, the electronic density contrast between the exposed and unexposed regions of the resists could be enhanced in order to image the patterns with sub-nm precision. Critical-dimension grazing incidence small-angle X-ray scattering (CDGISAXS) was then performed at energies where the contrast was maximized, enabling the reconstruction of the 3D shape of the latent image. This demonstrates the potential of RSOXS to provide a high-resolution heightsensitive profile of patterned EUV resists, whichmore » will help to quantify the evolution of critical features, such as the line edge roughness, at each step of the nanofabrication process.« less

Authors:
; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1602829
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Conference
Resource Relation:
Conference: International Conference on Extreme Ultraviolet Lithography 2018
Country of Publication:
United States
Language:
English

Citation Formats

Pandolfi, Ronald J, Freychet, Guillaume, Cordova, Isvar, McAfee, Terry, Anderson, Chris, Wang, Cheng, Naulleau, Patrick, Hexemer, Alexander, and Kumar, Dinesh. Using resonant soft x-ray scattering to image patterns on undeveloped resists. United States: N. p., 2018. Web. doi:10.1117/12.2502769.
Pandolfi, Ronald J, Freychet, Guillaume, Cordova, Isvar, McAfee, Terry, Anderson, Chris, Wang, Cheng, Naulleau, Patrick, Hexemer, Alexander, & Kumar, Dinesh. Using resonant soft x-ray scattering to image patterns on undeveloped resists. United States. doi:10.1117/12.2502769.
Pandolfi, Ronald J, Freychet, Guillaume, Cordova, Isvar, McAfee, Terry, Anderson, Chris, Wang, Cheng, Naulleau, Patrick, Hexemer, Alexander, and Kumar, Dinesh. Tue . "Using resonant soft x-ray scattering to image patterns on undeveloped resists". United States. doi:10.1117/12.2502769.
@article{osti_1602829,
title = {Using resonant soft x-ray scattering to image patterns on undeveloped resists},
author = {Pandolfi, Ronald J and Freychet, Guillaume and Cordova, Isvar and McAfee, Terry and Anderson, Chris and Wang, Cheng and Naulleau, Patrick and Hexemer, Alexander and Kumar, Dinesh},
abstractNote = {Copyright © 2018 SPIE. Extreme ultraviolet lithography is one of the most promising printing techniques for high volume semiconductor manufacturing at the 14 nm half-pitch device node and beyond. However, key challenges around EUV photoresist materials such as the exposure-dose sensitivity or the line-width roughness continue to impede the full adoption into industrial nanofab facilities. New metrology tools are required to address these challenges by helping to determine the impact of the EUV materials' properties and processing conditions on the roughness through the different step of the process. Here, we apply the resonant soft x-ray scattering (RSOXS) technique to gain insights into the structure of patterned EUV resists before the development step takes place. By using energies around the carbon absorption edge to take advantage of small differences in chemistry, the electronic density contrast between the exposed and unexposed regions of the resists could be enhanced in order to image the patterns with sub-nm precision. Critical-dimension grazing incidence small-angle X-ray scattering (CDGISAXS) was then performed at energies where the contrast was maximized, enabling the reconstruction of the 3D shape of the latent image. This demonstrates the potential of RSOXS to provide a high-resolution heightsensitive profile of patterned EUV resists, which will help to quantify the evolution of critical features, such as the line edge roughness, at each step of the nanofabrication process.},
doi = {10.1117/12.2502769},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {10}
}

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