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Apparatus and method for coating bulk quantities of solid particles

Patent ·
OSTI ID:1600437
; ;

An apparatus and method is described to coat small and large quantities of solid particles using atomic layer deposition, with increased material utilization and decreased cycle times. The resulting higher coating efficiency ALD process is achieved by a controlled pressure differential acting across a rotating porous vessel that contains a plurality of solid particles. The apparatus is comprised of two coaxial cylindrical porous vessels with a means for one to rotate, and a two stage rotary feedthrough with a specialized hollowed out shaft, which enables both rotation of the vessel and reactant, purge, and product gas transport across a particle bed that undergoes mixing.

Research Organization:
Sonata Scientific LLC, Bethel, CT (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
SC0013116
Assignee:
Sonata Scientific LLC (Bethel, CT)
Patent Number(s):
10,516,169
Application Number:
15/350,010
OSTI ID:
1600437
Country of Publication:
United States
Language:
English

References (7)

A Rotation Fluidization Coupled Atomic Layer Deposition Reactor for Nanoparticle Coating journal August 2016
Fluidized bed coupled rotary reactor for nanoparticles coating via atomic layer deposition journal July 2015
Rotary reactor for atomic layer deposition on large quantities of nanoparticles
  • McCormick, J. A.; Cloutier, B. L.; Weimer, A. W.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 25, Issue 1 https://doi.org/10.1116/1.2393299
journal January 2007
Fine particle coating by a novel rotating fluidized bed coater journal March 2004
Fluidization of nanoagglomerates in a rotating fluidized bed journal April 2006
MOCVD and ALD of CeO2Thin Films using a Novel Monomeric CeIVAlkoxide Precursor journal December 2009
Fundamental particle fluidization behavior and handling of nano-particles in a rotating fluidized bed journal April 2008

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36 MATERIALS SCIENCE