Magnetoelastically actuated MEMS device and methods for its manufacture

Langlois, Eric; Arrington, Christian L.; Finnegan, Patrick S.; Hollowell, Andrew E.; Pillars, Jamin Ryan; Monson, Todd

Title: Magnetoelastically actuated MEMS device and methods for its manufacture

Patent · Tue Dec 17 00:00:00 EST 2019

OSTI ID:1600415

Langlois, Eric; Arrington, Christian L.; Finnegan, Patrick S.; Hollowell, Andrew E.; Pillars, Jamin Ryan; Monson, Todd

A magnetoelastically actuated device includes a microscale cantilever arm supported at a standoff distance from a substrate. The cantilever arm is formed as a laminar magnetic actuator configured to bend when it is subjected to a magnetic field. The cantilever arm includes a film of magnetostrictive material. Also provided is a method for fabricating the magnetoelastically actuated device. The method includes defining an actuator mold in a layer of photoresist on a structural layer of the cantilever arm and electrodepositing a layer of a magnetostrictive alloy containing cobalt and iron onto the structural layer within the actuator mold.

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

DOE Contract Number:: AC04-94AL85000; NA0003525

Assignee:: National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)

Patent Number(s):: 10,510,945

Application Number:: 15/719,219

OSTI ID:: 1600415

Resource Relation:: Patent File Date: 09/28/2017

Country of Publication:: United States

Language:: English

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