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Title: Silicon-based visible and near-infrared optoelectric devices

Patent ·
OSTI ID:1568679
;

In one aspect, the present invention provides a silicon photodetector having a surface layer that is doped with sulfur inclusions with an average concentration in a range of about 0.5 atom percent to about 1.5 atom percent. The surface layer forms a diode junction with an underlying portion of the substrate. A plurality of electrical contacts allow application of a reverse bias voltage to the junction in order to facilitate generation of an electrical signal, e.g., a photocurrent, in response to irradiation of the surface layer. The photodetector exhibits a responsivity greater than about 1 A/W for incident wavelengths in a range of about 250 nm to about 1050 nm, and a responsivity greater than about 0.1 A/W for longer wavelengths, e.g., up to about 3.5 microns.

Research Organization:
Harvard Univ., Cambridge, MA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FC36-016011051
Assignee:
President and Fellows of Harvard College (Cambridge, MA)
Patent Number(s):
10,374,109
Application Number:
15/784,756
OSTI ID:
1568679
Resource Relation:
Patent File Date: 10/16/2017
Country of Publication:
United States
Language:
English

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Solid State Imaging Device, Method of Manufacturing the Same, and Imaging Apparatus patent-application April 2009
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Josephson tunnel junction device with hydrogenated amorphous silicon, germanium or silicon-germanium alloy tunneling barrier patent November 1979
Solid-State Image Pickup Device patent-application November 2003
Selective laser annealing of semiconductor material patent October 2009
Backside Illuminated Imaging Sensor with Vertical Pixel Sensor patent-application August 2009
Stage apparatus, scanning type exposure apparatus, and device produced with the same patent December 2001
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Method for the Preparation of Group IB-IIIA-VIA Quaternary or Higher Alloy Semiconductor Films patent-application July 2010
Image Sensor Having Curved Micro-Mirrors Over the Sensing Photodiode and Method for Fabricating patent-application June 2011
Integrated IR and visible detector patent December 1994
Photovoltaic Device and Process for Producing Same patent-application August 2008
Monolithic diode assay patent September 1996
Method for balancing cells in a battery pack patent October 2011
Laser curing of spin-on dielectric thin films patent September 2000
Solar Cell Having Crystalline Silicon P-N Homojunction and Amorphous Silicon Heterojunction for Surface Passivation patent-application August 2009
Light-sensing device patent April 2009
Apparatus to control the amount of oxygen incorporated into polycrystalline silicon film during excimer laser processing of silicon films patent June 2003
Solid-State Imaging Element, Method of Manufacturing the Same, Solid-State Imaging Apparatus, and Imaging Apparatus patent-application March 2012
Semiconductor photodetection element patent January 2014
Method and apparatus for histological and physiological biometric operation and authentication patent November 2002
Semiconductor device having a semiconductor film of low oxygen concentration patent July 1999
Silicon-Based Visible and Near-infrared Optoelectric Devices patent-application July 2009
Backside-Illuminated Imaging Sensor Including Backside Passivation patent-application January 2010
Method of manufacturing photoluminescing semiconductor material using lasers patent January 1997
Medical Imaging with Black Silicon Photodetector patent-application March 2010
Overload prevention in a telecommunication network node patent April 1999
Method of manufacturing an electronic device using thermally stable mask patent January 1998
Sensor Element Isolation in a Backside Illuminated Image Sensor patent-application October 2011
Interferometric Photovoltaic Cell patent-application March 2009
Engineering flat surfaces on materials doped via pulsed laser irradiation patent December 2013
Method and apparatus providing graded-index microlenses patent July 2009
Fluorescent Material, a Method of Manufacturing the Fluorescent Material, A radiation Detector Using the Fluorescent Material, and an X-ray CT Scanner patent-application October 2009
Multiple color detection elevated pin photo diode active pixel sensor patent August 2000
CMOS image sensor and fabricating method thereof patent-application July 2006
Image Capturing Apparatus patent-application May 2007
Current-matched high-efficiency, multijunction monolithic solar cells patent June 1993
Laser Activation of Implanted Contact Plug for Memory Bitline Fabrication patent-application July 2006
CMOS Image Sensor with Increased Dynamic Range patent-application July 2008
Integrated optical head patent December 1989
Method of fabricating silicon devices on sapphire with wafer bonding at low temperature patent June 2005
Solid State Imaging Device Method of Manufacturing the Same, and Imaging Apparatus patent-application April 2009
Image sensor with pixel isolation system and manufacturing method therefor patent July 2004
Phototonic device with strain-induced three dimensional growth morphology patent December 2001
Solid-State Imaging Device, Optical Sensor and Method of Operating Solid-State Imaging Device patent-application October 2008
Ultra-thin semiconductors bonded on glass substrates patent September 2007
Solar cell with grooved surface patent August 1976
Image Processing device for Correcting Signal Irregularity, calibration method, Imaging Device, Image Processing Program , and Image Processing Method patent-application March 2010
Method for fabricating silicon cells patent August 1998
Isolation Structures for Preventing Photons and Carriers From Reaching Active Areas and Methods of Formation patent-application August 2005
Multiple Junction Photovoltaic Devices and Process for Making the Same patent-application December 2010
CMOS image sensors including backside illumination structure patent April 2012
Client-server architecture using internet and public switched networks patent November 1999
Phototransistor patent-application August 2009
Multijunction solar cell with bonded transparent conductive interlayer patent-application June 2007
High-Resolution Optical Code Imaging Using a Color Imager patent-application August 2010
Photosensitive Imaging Devices and Associated Methods patent-application September 2011
Process for preparing low defect density silicon using high growth rates patent February 2004
Personal Authentication Apparatus and Mobile Communication Terminal patent-application June 2011
Semiconductor device, manufacturing process thereof and imaging device patent November 2009
Semiconductor device with multi-electrode construction equivalent to variable capacitance diode patent December 1986
Apparatus for treating an object using ultra-violet light patent August 2001
Balanced overvoltage protector for a dual-wire system patent July 1998
Solar Cell and Its Spectrum Convertor patent-application June 2009
Arrangements with Pyramidal Features Having at Least One Nanostructured Surface and Methods of Making and Using patent-application December 2014
Semiconductor light-detecting element patent December 2014
Three-dimensional island pixel photo-sensor patent May 2006
Solar Cell patent-application March 2011
Surface Modification Method for solid Sample, Impurity Activation Method, and Method for Manufacturing Semiconductor Device patent-application December 2007
Method and apparatus for the rotary sawing of brittle and hard materials patent October 1994
Photodiode and photodiode array patent March 2015
Structured Light Imaging System patent-application November 2012
Silicon-based visible and near-infrared optoelectric devices patent March 2016
Avalanche Pixel Sensors and Related Methods patent-application April 2009
Systems and methods for light absorption and field emission using microstructured silicon patent-application February 2003
Wide spectral range hybrid image detector patent November 2011
Minimization of Surface Reflectivity Variations patent-application May 2009
Dopant type and/or concentration selective dry photochemical etching of semiconductor materials patent March 1987
System and a method for a smart surveillance system patent April 2008
Solar Battery and Production Method Thereof patent-application April 2009
Image Sensor and Image Sensing System Including the Same patent-application June 2010
Silicon wafer with embedded optoelectronic material for monolithic OEIC patent January 2004
Solid-State Image Pickup Device, Method of Manufacturing Solid-State Image Pickup Device and Electronic Apparatus patent-application July 2012
Femtosecond Laser-Induced Formation of Submicrometer Spikes on a Semiconductor Substrate patent-application April 2006
Thin Film Transistor Having High Mobility and High On-Current and Method for Manufacturing the Same patent-application May 2002
High-capacitance photodiode patent January 2004
Laser Diffusion Fabrication of Solar Cells patent-application March 2010
Manufacturing method of thin film device substrate patent August 2007
Method for treating an object using ultra-violet light patent October 2002
Chip module for complete power train patent January 2011
Solar Cell and Method of Manufacturing the Same patent-application October 2010
Semiconductor Structure for Imaging Detectors patent-application May 2006
Thermophotovoltaic in-situ mirror cell patent May 1997
One-Step Black Level Calibration for Image Sensors patent-application April 2009
Method of fabricating backside illuminated image sensor patent January 2010
Response-enhanced monolithic-hybrid pixel patent October 2012
Single light sensor optical probe for monitoring blood parameters and cardiovascular measurements patent December 2002
Integrated optical device having integral photodetector patent November 1987
Image Sensor and Method for Manufacturing the Same patent-application June 2007
Rapid Thermal Processing Using Energy Transfer Layers patent-application October 2006
Solar cell having an emitter provided with a surface texture and a process for the fabrication thereof patent November 2000
Semiconductor Photodetection Element patent-application November 2011
Use of polysilicon for smoothing of liquid crystal MOS displays patent June 1984
Schottky-Diode Semiconductor Device patent-application March 2004
Optical properties of solar cells using tilted geometrical features patent January 1992
CMOS Three-Dimensional Image Sensor Detectors Having Reduced Inter-Gate Capacitance, and Enhanced Modulation Contrast patent-application December 2011
Back-Side Image Sensor patent-application March 2011
Imager patent-application March 2007
Laser Irradiation Method, Laser Irradiation Apparatus and Method for Manufacturing Semiconductor Device patent-application August 2007
Blocked impurity band detectors patent February 1986
Response-Enhanced Monolithic-Hybrid Pixel patent-application March 2010
Imager pixel with capacitance for boosting reset voltage patent November 2008
TFA Image Sensor with Stability-Optimized Photodiode patent-application January 2006
Photodetector Isolation in Image Sensors patent-application April 2012
Shallow trench textured regions and associated methods patent December 2015
Freight-carrying platforms patent October 1985
Hybrid infrared detector array and CMOS readout integrated circuit with improved dynamic range patent June 2009
Metalized semiconductor substrates for Raman spectroscopy patent-application July 2010
Method of Fabricating Polysilicon Film by Excimer Laser Crystallization Process patent-application November 2004
Composite laminate circuit structure and methods of interconnecting the same patent November 2002
Wide Band Light Sensing Pixel Array patent-application December 2004
Micro Heating of Selective Regions patent-application November 2001
Backside Thinned Image Sensor with Integrated Lens Stack patent-application March 2007
Method for Semiconductor Gate Doping patent-application March 2003
Backside Illuminated Imaging Sensor with Silicide Light Reflecting Layer patent-application August 2009
Image sensor for stabilizing a black level patent May 2014
High Efficiency Low Cost Crystalline-Si Thin Film Solar Module patent-application December 2010
Photodetecting Imager Devices Having Correlated Double Sampling and Associated Methods patent-application December 2012
Biometric detection using spatial, temporal, and/or spectral techniques patent January 2013
Solid-state imaging device, method of manufacturing the same, and electronic equipment patent May 2013
Imaging Apparatus, Medium, and Method Using Infrared Rays with Image Discrimination patent-application May 2006
CMOS imager with Cu wiring and method of eliminating high reflectivity interfaces therefrom patent August 2010
Highly-depleted laser doped semiconductor volume patent June 2010
Semiconductor structure processing using multiple laser beam spots spaced on-axis with cross-axis offset patent September 2008
Solid State Luminaires for General Illumination patent-application October 2007
Photovoltaics on silicon patent-application October 2008
Heteroepitaxial Crystal Quality Improvement patent-application October 2008
Selective laser anneal process using highly reflective aluminum mask patent September 2001
Solar Cell Contact Formation Process Using Patterned Etchant Material patent-application May 2011
Laser assisted direct imprint lithography patent May 2007
Anti-Reflection Structures for CMOS Image Sensors patent-application October 2010
Solid-state image sensor including a photoelectric conversion element, a charge conversion element, and a light shielding element, method for producing the same solid-state image sensor, and electronic apparatus including the same solid-state image sensor patent May 2017
Wide Spectral Range Hybrid Image Detector patent-application September 2009
Femtosecond laser processing system with process parameters, controls and feedback patent-application October 2005
Optical absorption enhancement in amorphous silicon deposited on rough substrate patent April 1985
Solid-State Imaging Device, Driving Method of Solid-State Imaging Device, and Electronic Apparatus patent-application September 2010
Semiconductor Light-Emitting Device and Its Manufacturing Method patent-application October 2006
Printing master comprising strain gauges patent October 2000
Method of creating defect free high Ge content (>25%) SiGe-on-insulator (SGOI) substrates using wafer bonding techniques patent June 2007
Screen printing method and screen printing apparatus patent October 2000
Multi-spectrum photosensitive device patent November 2015
Stacked Photovoltaic Device patent-application November 2003
Semiconductor range-finding element and solid-state imaging device patent March 2011
Stereoscopic Image Generating Device and Stereoscopic Image Generating Method patent-application May 2013
Solid-State Image Sensor, Method for Producing Solid-State Image Sensor, and Electronic Apparatus patent-application August 2017
Three Dimensional Architecture Semiconductor Devices and Associated Methods patent-application July 2013
High-Capacitance Photodiode patent-application August 2002
Protection component for automobile circuit patent March 1996
Device and Method for Generating Images patent-application November 2006
Opto-Thermal Annealing Mask and Method patent-application August 2007
Process for making a monolithic integrated structure incorporating opto-electronic components and structure made in this way patent March 1998
Vertical color photo-detector with increased sensitivity and compatible video interface patent June 2004
Photovoltaic Device and Method of Manufacturing the Same patent-application February 2010
Image sensor patent March 1990
Method for Forming P-Type Semiconductor Region, and Semiconductor Element patent-application December 2007
Process Module for Increasing the Response of Backside Illuminated Photosensitive Imagers and Associated Methods patent-application December 2012
Low temperature texturing layer to enhance adhesion of subsequent layers patent January 2008
Pinned photodiode structure and method of formation patent November 2009
Peel-apart photosensitive element patent August 1993
Tandem solar cell patent June 1991
Silicon-based visible and near-infrared optoelectric devices patent March 2009
Visible and near infrared imaging system patent October 1986
Light sensitive semiconductor component patent July 2003
Exposure apparatus with laser source requiring new gas introduction patent January 1995
Semiconductor device and method of manufacturing the same patent September 2003
Backside illuminated image sensor having deep light reflective trenches patent September 2010
Low-capacitance bidirectional protection device patent July 2005
Method of forming a conductive film on an insulating region of a substrate patent December 1996
Solid-state imaging device patent May 2013
Method and Structure for Hydrogenation of Silicon Substrates with Shaped Covers patent-application March 2009
Semiconductor texturing process patent November 2010
II-VI semiconductor component having at least one junction between a layer containing Se and a layer containing BeTe, and process for producing the junction patent April 2002
High performance ultraviolet imager for operation at room temperature patent November 2002
Image pick-up apparatus with high resolution and anti-bloom characteristics patent March 1990
One Chip, Low Light Level Color Camera patent-application November 2003
Method and apparatus for desorption and ionization of analytes patent August 2008
Imaging Sensors with Optical Cavity Pixels patent-application August 2013
Diamond wafer, method of estimating a diamond wafer and diamond surface acoustic wave device patent November 2001
Image sensor or LCD including switching pin diodes patent May 2001
Wideband semiconducting light detector patent December 2010
Semiconductor Voltage Transformer patent November 1975
Solid-State Imaging Device, Production Method Thereof, and Electronic Device patent-application October 2009
Image Sensor, Electronic Apparatus, and Driving Method of Electronic Apparatus patent-application November 2008
Backside illuminated image sensor device with refractive index dependent layer thicknesses and method of forming the same patent December 2013
Semiconductor light-detecting element patent-application December 2011
Laser annealing apparatus patent July 2007
Method for forming a flash memory by forming shallow and deep regions adjacent the gate patent October 1996
Photosensitive Imaging Devices and Associated Methods patent-application October 2011
Zero-mode waveguides with non-reflecting walls patent December 2014
Identifying Ambient Light Type and Illuminance Compensation Using a Plurality of Photodetectors patent-application January 2012
Diode and power converting apparatus patent January 1999
Laser-Induced Structuring of Substrate Surfaces patent-application August 2009
Apparatus and methods for use in flash detection patent-application June 2007
Semiconductor device and method of manufacturing same patent January 1998
Methods for Fabricating Thin Film Solar Cells patent-application March 2010
Lateral Light Shield in Backside Illuminated Imaging Sensors patent-application August 2013
Method for the Production of Stress-Relaxed Layer Structure on a Non-Lattice Adapted Substrate and Utilization of Said Layer System in Electronic and/or Optoelectronic Components patent-application July 2006
Method of making photodetectors using ion implantation and laser annealing patent December 1980
Method for Fabricating an Integrated Circuit Comprising a Photodiode and Corresponding Integrated Circuit patent-application November 2006
Multicrystalline laser-crystallized silicon thin layer solar cell deposited on a glass substrate and method of producing patent August 2006
Security check provision patent June 2005
Photodetector and method for detecting radiation patent November 2004
Backside illuminated CMOS image sensor with pinned photodiode patent March 2009
Semiconductor laser structures patent October 1990
Image Reader Having Image Sensor Array patent-application July 2012
Integrated infrared and visible image sensors patent August 2000
Solar Cell Fabrication with Faceting and Ion Implantation patent-application December 2009
Method of Manufacturing Photoelectric Conversion Device patent-application June 2009
Optically readable radiation-displacement-conversion devices and methods, and image-rendering apparatus and methods employing same patent June 2000
Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate patent October 2008
Back Side Contact Solar Cell Structures And Fabrication Processes patent-application January 2011
Photovoltaic cell and method for fabrication of said cell patent December 1996
Patterned roller for the micro-replication of complex lenses patent June 2003
Feedthrough Design and Method for a Hermetically Sealed Microdevice patent-application April 2004
Compact Backlight Assembly Capable of Adjusting Light Color Level patent-application July 2008
Laser processing method for trench-edge-defect-free solid phase epitaxy in confined geometrics patent June 2009
Monocrystalline semiconductor wafer comprising defect-reduced regions and method for producing it patent January 2012
Etching Solution for Wet Chemical Pyramidal Texture Etching of Silicon Surfaces patent-application June 2002
Vein authentication apparatus, imaging apparatus for vein authentication, and vein illuminating method patent February 2014
Motion Detection in Medical Systems patent-application October 2011
Image Sensor and Electromagnetic Radiation Imaging Device patent-application March 2009
Ultrafast All-Optical Switch Using Carbon Nanotube Polymer Composites patent-application November 2002
Materials, systems and methods for optoelectronic devices patent April 2011
Semiconductor Package and Method of Manufacturing the Same patent-application May 2010
Surface reflecting mirror having a surface reflecting multilayer film patent December 1996
Apparatuses and Methods for Irradiating a Substrate to Avoid Substrate Edge Damage patent-application July 2008

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