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Title: The Velociprobe: An ultrafast hard X-ray nanoprobe for high-resolution ptychographic imaging

Abstract

Motivated by the advanced photon source upgrade, a new hard X-ray microscope called "Velociprobe" has been recently designed and built for fast ptychographic imaging with high spatial resolution. We are addressing the challenges of high-resolution and fast scanning with novel hardware designs, advanced motion controls, and new data acquisition strategies, including the use of high-bandwidth interferometric measurements. The use of granite, air-bearing-supported stages provides the necessary long travel ranges for coarse motion to accommodate real samples and variable energy operation while remaining highly stable during fine scanning. Scanning the low-mass zone plate enables high-speed and high-precision motion of the probe over the sample. With an advanced control algorithm implemented in a closed-loop feedback system, the setup achieves a position resolution (3σ) of 2 nm. The instrument performance is evaluated by 2D fly-scan ptychography with our developed data acquisition strategies. A spatial resolution of 8.8 nm has been demonstrated on a Au test sample with a detector continuous frame rate of 200 Hz. Using a higher flux X-ray source provided by double-multilayer monochromator, we achieve 10 nm resolution for an integrated circuit sample in an ultrafast scan with a detector's full continuous frame rate of 3000 Hz (0.33 ms per exposure),more » resulting in an outstanding imaging rate of 9 x 10 4 resolution elements per second« less

Authors:
ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [1];  [1];  [1]; ORCiD logo [1];  [1];  [1];  [1];  [1];  [1];  [1];  [1];  [2]; ORCiD logo [2];  [1];  [1];  [1];  [1]
  1. Argonne National Lab. (ANL), Lemont, IL (United States)
  2. Oregon State Univ., Corvallis, OR (United States)
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC); U.S. Department of National Intelligence - Intelligence Advanced Research Projects Activity (IARPA)
OSTI Identifier:
1565795
Alternate Identifier(s):
OSTI ID: 1557375
Grant/Contract Number:  
AC02-06CH11357; 2015-153-N0
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 90; Journal Issue: 8; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 47 OTHER INSTRUMENTATION

Citation Formats

Deng, Junjing, Preissner, Curt, Klug, Jeffrey A., Mashrafi, Sheikh, Roehrig, Christian, Jiang, Yi, Yao, Yudong, Wojcik, Michael, Wyman, Max D., Vine, David, Yue, Ke, Chen, Si, Mooney, Tim, Wang, Maoyu, Feng, Zhenxing, Jin, Dafei, Cai, Zhonghou, Lai, Barry, and Vogt, Stefan. The Velociprobe: An ultrafast hard X-ray nanoprobe for high-resolution ptychographic imaging. United States: N. p., 2019. Web. doi:10.1063/1.5103173.
Deng, Junjing, Preissner, Curt, Klug, Jeffrey A., Mashrafi, Sheikh, Roehrig, Christian, Jiang, Yi, Yao, Yudong, Wojcik, Michael, Wyman, Max D., Vine, David, Yue, Ke, Chen, Si, Mooney, Tim, Wang, Maoyu, Feng, Zhenxing, Jin, Dafei, Cai, Zhonghou, Lai, Barry, & Vogt, Stefan. The Velociprobe: An ultrafast hard X-ray nanoprobe for high-resolution ptychographic imaging. United States. doi:10.1063/1.5103173.
Deng, Junjing, Preissner, Curt, Klug, Jeffrey A., Mashrafi, Sheikh, Roehrig, Christian, Jiang, Yi, Yao, Yudong, Wojcik, Michael, Wyman, Max D., Vine, David, Yue, Ke, Chen, Si, Mooney, Tim, Wang, Maoyu, Feng, Zhenxing, Jin, Dafei, Cai, Zhonghou, Lai, Barry, and Vogt, Stefan. Thu . "The Velociprobe: An ultrafast hard X-ray nanoprobe for high-resolution ptychographic imaging". United States. doi:10.1063/1.5103173. https://www.osti.gov/servlets/purl/1565795.
@article{osti_1565795,
title = {The Velociprobe: An ultrafast hard X-ray nanoprobe for high-resolution ptychographic imaging},
author = {Deng, Junjing and Preissner, Curt and Klug, Jeffrey A. and Mashrafi, Sheikh and Roehrig, Christian and Jiang, Yi and Yao, Yudong and Wojcik, Michael and Wyman, Max D. and Vine, David and Yue, Ke and Chen, Si and Mooney, Tim and Wang, Maoyu and Feng, Zhenxing and Jin, Dafei and Cai, Zhonghou and Lai, Barry and Vogt, Stefan},
abstractNote = {Motivated by the advanced photon source upgrade, a new hard X-ray microscope called "Velociprobe" has been recently designed and built for fast ptychographic imaging with high spatial resolution. We are addressing the challenges of high-resolution and fast scanning with novel hardware designs, advanced motion controls, and new data acquisition strategies, including the use of high-bandwidth interferometric measurements. The use of granite, air-bearing-supported stages provides the necessary long travel ranges for coarse motion to accommodate real samples and variable energy operation while remaining highly stable during fine scanning. Scanning the low-mass zone plate enables high-speed and high-precision motion of the probe over the sample. With an advanced control algorithm implemented in a closed-loop feedback system, the setup achieves a position resolution (3σ) of 2 nm. The instrument performance is evaluated by 2D fly-scan ptychography with our developed data acquisition strategies. A spatial resolution of 8.8 nm has been demonstrated on a Au test sample with a detector continuous frame rate of 200 Hz. Using a higher flux X-ray source provided by double-multilayer monochromator, we achieve 10 nm resolution for an integrated circuit sample in an ultrafast scan with a detector's full continuous frame rate of 3000 Hz (0.33 ms per exposure), resulting in an outstanding imaging rate of 9 x 104 resolution elements per second},
doi = {10.1063/1.5103173},
journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 8,
volume = 90,
place = {United States},
year = {2019},
month = {8}
}

Journal Article:
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Figures / Tables:

FIG. 1 FIG. 1: Rendering of the CAD model of the Velociprobe showing a view of the whole instrument (left), a view with the granite cut away (right), and the beam direction (cyan arrows). A flat steel plate (1) is grouted to the floor. The granite base (2) sits on the plate.more » The granite vertical coarse Y axis driver (3) and the granite wedges (4) sit on the base. The granite wedge that moves vertically is guided by the ball spline (5). The granite horizontal coarse X axis driver (6) sit on the vertical wedge, driving the granite horizontal block (7). The sample stack (8) sits on the granite coarse X block. The sample stack can be moved in X independently. The piezo driven optics stack (9) is hung from the granite gantry (10) which can be moved along beam direction (Z axis).« less

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    Figures/Tables have been extracted from DOE-funded journal article accepted manuscripts.