The Velociprobe: An ultrafast hard X-ray nanoprobe for high-resolution ptychographic imaging

Deng, Junjing; Preissner, Curt; Klug, Jeffrey A.; Mashrafi, Sheikh; Roehrig, Christian; Jiang, Yi; Yao, Yudong; Wojcik, Michael; Wyman, Max D.; Vine, David; Yue, Ke; Chen, Si; Mooney, Tim; Wang, Maoyu; Feng, Zhenxing; Jin, Dafei; Cai, Zhonghou; Lai, Barry; Vogt, Stefan

doi:10.1063/1.5103173

Title: The Velociprobe: An ultrafast hard X-ray nanoprobe for high-resolution ptychographic imaging

Journal Article · Thu Aug 15 00:00:00 EDT 2019 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.5103173· OSTI ID:1565795

^[1];

^[1]; Mashrafi, Sheikh ^[1]; Roehrig, Christian ^[1];

^[1]; Yao, Yudong ^[1]; Wojcik, Michael ^[1]; Wyman, Max D. ^[1]; Vine, David ^[1]; Yue, Ke ^[1]; Chen, Si ^[1]; Mooney, Tim ^[1]; Wang, Maoyu ^[2];

^[2]; Jin, Dafei ^[1]; Cai, Zhonghou ^[1]; Lai, Barry ^[1]; Vogt, Stefan ^[1]

Argonne National Lab. (ANL), Lemont, IL (United States)
Oregon State Univ., Corvallis, OR (United States)

Motivated by the advanced photon source upgrade, a new hard X-ray microscope called "Velociprobe" has been recently designed and built for fast ptychographic imaging with high spatial resolution. We are addressing the challenges of high-resolution and fast scanning with novel hardware designs, advanced motion controls, and new data acquisition strategies, including the use of high-bandwidth interferometric measurements. The use of granite, air-bearing-supported stages provides the necessary long travel ranges for coarse motion to accommodate real samples and variable energy operation while remaining highly stable during fine scanning. Scanning the low-mass zone plate enables high-speed and high-precision motion of the probe over the sample. With an advanced control algorithm implemented in a closed-loop feedback system, the setup achieves a position resolution (3σ) of 2 nm. The instrument performance is evaluated by 2D fly-scan ptychography with our developed data acquisition strategies. A spatial resolution of 8.8 nm has been demonstrated on a Au test sample with a detector continuous frame rate of 200 Hz. Using a higher flux X-ray source provided by double-multilayer monochromator, we achieve 10 nm resolution for an integrated circuit sample in an ultrafast scan with a detector's full continuous frame rate of 3000 Hz (0.33 ms per exposure), resulting in an outstanding imaging rate of 9 x 10⁴ resolution elements per second

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Research Organization:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC); U.S. Department of National Intelligence - Intelligence Advanced Research Projects Activity (IARPA)

Grant/Contract Number:: AC02-06CH11357; 2015-153-N0

OSTI ID:: 1565795

Alternate ID(s):: OSTI ID: 1557375

Journal Information:: Review of Scientific Instruments, Vol. 90, Issue 8; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 39 works

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