Surface and subsurface film growth of titanium dioxide on polydimethylsiloxane by atomic layer deposition
Journal Article
·
· Appl. Surf. Sci.
- UIC
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
- Sponsoring Organization:
- National Science Foundation (NSF)
- OSTI ID:
- 1557299
- Journal Information:
- Appl. Surf. Sci., Vol. 493, Issue 11, 2019
- Country of Publication:
- United States
- Language:
- ENGLISH
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