Silicon nanomembranes as a means to evaluate stress evolution in deposited thin films
Journal Article
·
· Extreme Mechanics Letters
- Sponsoring Organization:
- USDOE
- Grant/Contract Number:
- FG02-03ER46028
- OSTI ID:
- 1250230
- Alternate ID(s):
- OSTI ID: 1556409
- Journal Information:
- Extreme Mechanics Letters, Vol. 1, Issue C; ISSN 2352-4316
- Publisher:
- ElsevierCopyright Statement
- Country of Publication:
- Netherlands
- Language:
- English
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