Sputtering in a high-flux plasma environment
Journal Article
·
· Scripta Materialia
- Sponsoring Organization:
- USDOE
- Grant/Contract Number:
- FG02-07ER54912
- OSTI ID:
- 1550269
- Journal Information:
- Scripta Materialia, Journal Name: Scripta Materialia Vol. 143 Journal Issue: C; ISSN 1359-6462
- Publisher:
- ElsevierCopyright Statement
- Country of Publication:
- United States
- Language:
- English
Cited by: 9 works
Citation information provided by
Web of Science
Web of Science
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