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Title: The Control of an Array of Micro-mirrors

Technical Report ·
DOI:https://doi.org/10.2172/1548330· OSTI ID:1548330
 [1];  [2];  [1]
  1. Univ. of California, Los Angeles, CA (United States)
  2. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

The goal of this project is to develop an array of micro electromechanical systems (MEMS) mirrors with the following characteristics: three degrees of freedom (tip, tilt, piston); ±10° range of motion; and 40kHz closed-loop bandwidth. The combination of these characteristics will push the boundaries of devices currently in the literature, enabling a myriad of applications, from glasses-less stereo imagery to high-performance beam steering.

Research Organization:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC52-07NA27344
OSTI ID:
1548330
Report Number(s):
LLNL-TR-756605; 943901
Country of Publication:
United States
Language:
English

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